Pattern formation method, liquid droplet ejection apparatus and electro-optical device

Abstract

A pattern formation method for forming a pattern by ejecting a liquid droplet of a pattern forming material in a pattern formation region of a substrate includes: ejecting the liquid droplet at an outer periphery of the pattern formation region in an ejection direction directing from an inside of the pattern formation region toward an outside thereof when viewed from a normal line direction of the substrate.

1. A pattern formation method for forming a pattern by ejecting a liquid droplet of a pattern forming material in a pattern formation region of a substrate, the method comprising:
 ejecting the liquid droplet at an outer periphery of the pattern formation region in an ejection direction directing from an inside of the pattern formation region toward an outside thereof when viewed from a normal line direction of the substrate. 
 
   
   
     2. The pattern formation method according to  claim 1 , wherein the outer periphery is an interface between an adjacent plurality of the pattern formation regions, the method including ejecting the liquid droplet in an ejection direction directing from an inside of each pattern formation region toward the interface when viewed from the normal line direction of the substrate. 
   
   
     3. The pattern formation method according to  claim 2 , comprising ejecting the liquid droplet in an ejection direction having a component along the outer periphery between the pattern formation regions when viewed from the normal line direction of the substrate. 
   
   
     4. A liquid droplet ejection apparatus for forming a pattern by ejecting a liquid droplet of a pattern forming material in a pattern formation region of a substrate, the apparatus comprising:
 a liquid droplet ejection head for ejecting the liquid droplet at an outer periphery of the pattern formation region in an ejection direction directing from an inside of the pattern formation region toward an outside thereof when viewed from a normal line direction of the substrate. 
 
   
   
     5. The liquid droplet ejection apparatus according to  claim 4 , wherein the substrate includes an adjacent plurality of the pattern formation regions and the outer periphery is an interface between the adjacent plurality of the pattern formation regions. 
   
   
     6. The liquid droplet ejection apparatus according to  claim 4 , comprising a direction setting unit for setting the ejection direction by moving the liquid droplet ejection head. 
   
   
     7. The liquid droplet ejection apparatus according to  claim 6 , comprising a direction information generating unit for generating direction information relating to the ejection direction corresponding to the pattern formation region and a control device for drive-controlling the direction setting unit based on the direction information. 
   
   
     8. The liquid droplet ejection apparatus according to  claim 7 , further comprising:
 a plurality of the liquid droplet ejection heads; and 
 a plurality of the direction setting units corresponding to the plurality of the liquid droplet ejection heads, wherein the direction information generating unit generates the direction information such that the ejection directions corresponding to the plurality of the liquid droplet ejection heads intersect with each other on the substrate. 
 
   
   
     9. The liquid droplet ejection apparatus according to  claim 4 , further comprising a moving unit for relatively moving the substrate with respect to the liquid droplet ejection head such that the ejection direction has a component along the outer periphery of the pattern formation region. 
   
   
     10. An electro-optical device comprising a pattern formed by the liquid droplet ejection apparatus according to  claim 4 .