Micromechanical sensor having an analyzer circuit

Abstract

A micromechanical sensor having an analyzer circuit and at least two detecting elements, each of the two detecting elements being connected to the analyzer circuit by at least one signal line. At least one signal line is connected to both detecting elements.

1. A micromechanical sensor comprising:
 an electronic analyzer device; 
 at least two detecting elements separate from the analyzer device, wherein each of the two detecting elements includes a moveable electrode, a first stationary electrode and a second stationary electrode; 
 a first shared signal line connected to the first stationary electrode of each of the at least two detecting elements, the first shared signal line connecting the detecting elements in parallel to a plurality of bond pads on the analyzer device; and 
 a second shared signal line connected to the second stationary electrode of each of the at least two detecting elements, the second shared signal line connecting the detecting elements in parallel to the bond pads on the analyzer device; 
 wherein each moveable electrode is connected to the analyzer device by a dedicated, separate signal line. 
 
   
   
     2. The micromechanical sensor according to  claim 1 , wherein each of the two detecting elements is constructed so that a measured value is represented in the form of a differential capacitance. 
   
   
     3. The micromechanical sensor according to  claim 1 , further comprising first and second substrates, the analyzer device being situated on the first substrate and the at least two detecting elements being situated on the second substrate, and the first and second substrates being connected by a further signal line. 
   
   
     4. The micromechanical sensor according to  claim 1 , wherein there are N detecting elements and N+3 signal lines. 
   
   
     5. The micromechanical sensor according to  claim 1 , further comprising first, second and third substrates, as well as first and second substrate lines, and wherein:
 the analyzer device is situated on the first substrate, 
 a first of the detecting elements is situated on the second substrate, 
 at least a second of the detecting elements is situated on the third substrate, and 
 the first and second substrates are connected by the first substrate line, and the first and third substrates are connected by the second substrate line. 
 
   
   
     6. The micromechanical sensor according to  claim 1 , wherein there are N detecting elements and 2N+2 signal lines.