Scrubber for processing semiconductor waste gas

Abstract

Disclosed is a scrubber for processing semiconductor waste gas produced in a semiconductor fabricating process, wherein the scrubber burns the waste gas with a flame of a high temperature, filters and captures particles produced after the waste gas is burnt, and discharges particle-filtered waste gas to the atmosphere. The semiconductor waste gas processing scrubber includes: a supply section for supplying semiconductor waste gas, fuel and oxygen; a burner connected to the supply section so as to burn the semiconductor waste gas by flame; a burning chamber joined to the burner so as to cause particles, which are produced as the semiconductor waste gas is burnt, to drop; a wet tower installed at a side of the burning chamber so as to cause the particles, which are transferred from the burning chamber after adsorbing the particles using water, to drop; and a water reservoir tank connected to the burning chamber and the wet tower so as to capture the particles which have dropped from the burning chamber and the wet tower.

1. A scrubber for processing semiconductor waste gas comprising:
 a supply section for supplying semiconductor waste gas, fuel and oxygen; 
 a burner connected to the supply section so as to burn the semiconductor waste gas by flame; 
 a burning chamber joined to the burner so as to cause particles, which are produced as the semiconductor waste gas is burnt, to drop; 
 a wet tower installed at a side of the burning chamber so as to cause the particles, which are transferred from the burning chamber after adsorbing the particles using water, to drop; 
 a water reservoir tank connected to the burning chamber and the wet tower so as to capture the particles which have dropped from the burning chamber and the wet tower; and 
 a chamber support section, which is provided under the lower end of the burning chamber so as to support the burning chamber. 
 
     
     
       2. The scrubber as claimed in  claim 1 , wherein the supply section comprises:
 at least one waste gas supply tube connected to the burner so as to supply semiconductor waste gas to the burner; 
 at least one bypass waste gas supply tube connected to the waste gas supply tube so as to bypass the semiconductor waste gas; 
 at least one fuel supply tube connected to the burner so as to supply fuel to the burner; and 
 at least one oxygen supply tube connected to the burner so as to supply oxygen to the burner. 
 
     
     
       3. The scrubber as claimed in  claim 1 , wherein the burner comprises:
 a main body having at least one semiconductor waste gas supply passage, at least one fuel supply passage, and at least one oxygen supply passage; 
 a fuel nozzle body fitted on the circumferential edge of the main body, thereby forming a fuel supply space and a fuel supply nozzle; and 
 an oxygen nozzle body fitted on the circumferential edges of the main body and the fuel nozzle body, thereby forming an oxygen supply space and an oxygen supply nozzle; and 
 an assembly body fitted on the circumferential edges of the main body and the oxygen nozzle body, thereby forming a coolant flow space, the assembly body being connected to the burning chamber. 
 
     
     
       4. The scrubber as claimed in  claim 3 , wherein the main body comprises:
 an extension, which extends horizontally and radially outwardly substantially from the lower end of the main body to a predetermined extent and has at least one groove formed on the circumferential surface; 
 a first flange positioned above the extension, the first flange extending horizontally and radially outwardly from the main body to an extent larger than that of the extension; and 
 a second flange positioned above the first flange, the second flange extending horizontally and radially outwardly from the main body to an extent larger than that of the first flange, and 
 wherein the at least one semiconductor waste gas supply passage extends substantially vertically through the main body, the at least one fuel supply passage extends vertically through the main body so that the outlet of the fuel supply passage is formed between the extension and the first flange, and the at least one oxygen supply passage extends vertically through the main body, so that the outlet of the oxygen supply passage is formed between the first and second flanges. 
 
     
     
       5. The scrubber as claimed in  claim 4 , wherein the groove formed on the main body is inclined in such a manner that the virtual extension line of the lower end thereof crosses the central axis of the main body, and wherein the main body is in close contact with the fuel nozzle body, so that the groove form a fuel nozzle, and the fuel nozzle body is in close contact with the extension and the first flange, so that a fuel space is formed between the main body and the fuel nozzle body. 
     
     
       6. The scrubber as claimed in  claim 5 , wherein the fuel nozzle body comprises:
 a central hole formed through the central part of the fuel nozzle body, into which hole the main body is fitted, and 
 an extension formed around the lower end of the circumferential surface of the fuel nozzle body and radially extending to a predetermined extent, wherein at least one groove is formed on the circumferential surface of the extension. 
 
     
     
       7. The scrubber as claimed in  claim 6 , wherein the at least one groove formed on the extension of the fuel nozzle body is inclined in an angle larger than that of the groove formed on the extension of the main body, the fuel nozzle body is in close contact with the oxygen nozzle body, so that the at least one groove on the extension of the fuel nozzle body forms at least one oxygen nozzle, and the oxygen nozzle body is in close contact with the second flange of the main body and the at least one groove of the fuel nozzle body, so that one or more oxygen spaces are formed between the first and second flange and between the fuel nozzle body and the oxygen nozzle body. 
     
     
       8. The scrubber as claimed in  claim 4 , wherein the oxygen nozzle body comprises:
 a central hole formed through the central part of the oxygen nozzle body, into which hole the fuel nozzle body is fitted, and 
 an extension formed around the lower end of the circumferential surface of the oxygen nozzle body and radially outwardly extending to a predetermined extent. 
 
     
     
       9. The scrubber as claimed in  claim 8 , wherein the assembly body comprises a central hole formed through the central part of the assembly body, into which hole the oxygen nozzle body is fitted, and a coolant flow space is formed between the outer circumferential surface of the oxygen nozzle body and the inner circumferential surface of the assembly body, a coolant pipe being connected to the coolant flow space. 
     
     
       10. The scrubber as claimed in  claim 4 , wherein the main body has an inverted conical surface, the vertex of which forms the lower end of the main body, and a blocking wall extending downward by a predetermined length around the conical surface. 
     
     
       11. The scrubber as claimed in  claim 1 , wherein the burning chamber comprises:
 a top cover, into the center of which the burner is fitted; 
 an inner chamber depending from the bottom side of the top cover around the burner; and 
 an outer chamber depending from the bottom side of the top cover around the inner chamber. 
 
     
     
       12. The scrubber as claimed in  claim 11 , wherein a cooling tube is provided in a space between the top cover and the outer chamber for supplying coolant, and at least one through-hole is formed in the cooling tube, so that the coolant is injected into the space between the inner chamber and the outer chamber. 
     
     
       13. The scrubber as claimed in  claim 11 , wherein the inner chamber consists of an upper inner chamber and a lower inner chamber, which are detachable from each other, and the outer chamber also consists of an upper outer chamber and a lower outer chamber, which are detachable from each other. 
     
     
       14. The scrubber as claimed in  claim 11 , wherein the burning chamber comprises:
 a pilot burner positioned at the lower end of the burner through the outer chamber and the lower chamber to implement initial ignition, and 
 a UV sensor positioned at the lower end of the burner through the outer chamber and the inner chamber to detect whether the initial ignition is successfully implemented. 
 
     
     
       15. The scrubber as claimed in  claim 11 , wherein the burning chamber further comprises a particle removing gas supply section, which supplies a gas of predetermined pressure, so that particles do not accumulate on the inner wall of the burning chamber. 
     
     
       16. The scrubber as claimed in  claim 15 , wherein the particle removing gas supply section comprises:
 a gas supply tube joined to the outside of the top cover of the burning chamber; 
 a gas tube connected to the gas supply tube, the gas tube being formed in a ring shape along the space between the top cover and the inner chamber; and 
 at least one gas nozzle joined to the gas tube and extending by a predetermined length within the inner chamber. 
 
     
     
       17. The scrubber as claimed in  claim 16 , wherein the gas nozzle comprises:
 a straight part extending parallel to the inner wall of the burning chamber, and 
 a curved bending toward the inner wall of the burning chamber from the end of the straight part, so that the gas could supply impulse to the inner wall of the inner chamber. 
 
     
     
       18. The scrubber as claimed in  claim 16 , wherein there is provided four gas nozzles, which are arranged centering on the center of the inner chamber and spaced from each other in an angular space of 90 degrees. 
     
     
       19. The scrubber as claimed in  claim 16 , wherein the gas nozzles are inclined with reference to the vertical direction of the inner chamber, so that the gas can be supplied in a swirl form within the inner chamber. 
     
     
       20. The scrubber as claimed in  claim 16 , the gas supplied through the particle removing gas supply section is an inert gas. 
     
     
       21. The scrubber as claimed in  claim 16 , wherein the gas supplied through the particle removing gas supply section is supplied in a pulsed form. 
     
     
       22. The scrubber as claimed in  claim 16 , wherein a substantially funnel-shaped lower chamber is detachably attached to the lower part of the outer chamber of the burning chamber, and a particle guide member is incorporated in the inside of the lower chamber, the guide chamber being substantially funnel-shaped toward the lower end of the lower chamber so as to guide the particles produced after the burning of waste gas to the wet tower and the water tank. 
     
     
       23. The scrubber as claimed in  claim 22 , wherein the particle guide member further comprises an inert gas tube for injecting inert gas so as to prevent vapor, which is produced in the water reservoir tank, from being introduced into the burning chamber. 
     
     
       24. The scrubber as claimed in  claim 22 , wherein the lower chamber is provided with a chamber support section for supporting the burning chamber and allowing the burning member to be separated. 
     
     
       25. The scrubber as claimed in  claim 24 , wherein the chamber support section comprises:
 a pair of guide rails linearly installed on a support plate; 
 a pair of guide blocks mounted on the guide rails  1420  so as to be capable of reciprocating in the horizontal direction; 
 a pair of support dies mounted on the guide blocks and extending upward by a predetermined distance, each of the support dies having a horizontal surface formed at the top portion thereof and a descent surface extending downward from the horizontal surface in a predetermined angle; and 
 one or more support rods for interconnecting the support dies, the lower chamber being provided with rollers, which are mounted to be slidable along the horizontal surfaces or the descent surfaces of the support dies. 
 
     
     
       26. The scrubber as claimed in  claim 1 , wherein the wet tower comprises:
 a cylindrical base tower having base injection nozzles; 
 a cylindrical first tower removably mounted on the top of the base tower, a first filter and first nozzles being provided within the first tower; 
 a cylindrical second tower removably mounted on the top of the first tower, a second filter and second nozzles being provided within the second tower; 
 a cylindrical third tower removably mounted on the top of the second tower, a third filter and third nozzles being provided within the third tower; and 
 a cylindrical fourth tower removably mounted on the top of the third tower, plural impact plates and a gas supply pipe being provided within the fourth tower, 
 wherein the first tower and the second tower can be assembled in varying order and the third tower and fourth tower can be also assembled in varying order. 
 
     
     
       27. The scrubber as claimed in  claim 26 , wherein the first tower and the second tower are identical with each other in height and diameter, and the third tower and the fourth tower are identical with each other in height and diameter, and the diameter of the first and second towers is different from that of the third and fourth towers. 
     
     
       28. The scrubber as claimed in  claim 26 , wherein the porosities of the first filter, the second filter, and the third filter decrease in the order of the first filter, the second filter and the third filter. 
     
     
       29. The scrubber as claimed in  claim 26 , wherein fresh water is supplied through the base injection nozzles, and water purified from the water reservoir tank is supplied through the first, second and third injection nozzles. 
     
     
       30. The scrubber as claimed in  claim 26 , wherein a top-opened cover is fitted on the top of the fourth tower, a first exhaust tube having a pressure sensing port, a temperature sensing port and a cool air supply port is connected to the cover, and a second exhaust tube is connected to the top end of the first exhaust tube, the second exhaust gas having a exhaust amount control member, so that the exhaust amount can be controlled. 
     
     
       31. The scrubber as claimed in  claim 26 , wherein the base tower is connected to the burning chamber and the water reservoir tank through an intermediate connection tube and a lower connection tube, and the base injection nozzles are arranged in such a manner as to be capable of injecting water upward toward the first filter installed in the first tower. 
     
     
       32. The scrubber as claimed in  claim 26 , wherein the base tower further comprises a pressure sensing port so as to sense the pressure within the base tower. 
     
     
       33. The scrubber as claimed in  claim 26 , wherein the first injection nozzles of the first tower are arranged above the first filter in such a manner as to be capable of injecting water downward toward the first filter. 
     
     
       34. The scrubber as claimed in  claim 26 , wherein the first tower further comprises a transparent first window, which is formed in the wall of the first tower, so that the first filter within the first tower can be visually seen. 
     
     
       35. The scrubber as claimed in  claim 26 , wherein the second injection nozzles of the second tower are arranged above the second filter in such a manner as to be capable of injecting water downward toward the second filter. 
     
     
       36. The scrubber as claimed in  claim 26 , wherein the second tower further comprises a transparent second window, which is formed in the wall of the second tower, so that the second filter within the first tower can be visually seen. 
     
     
       37. The scrubber as claimed in  claim 26 , wherein the third injection nozzles of the third tower are arranged above the third filter in such a manner as to be capable of injecting water downward toward the third filter. 
     
     
       38. The scrubber as claimed in  claim 26 , wherein the impact plates of the fourth tower are each formed with plural through-holes and are stacked to be vertically spaced from each other, the through-holes formed in adjacent two impact plates are staggered from each other, and the gas supply pipe is arranged above the impact plates in such a manner as to be capable of supplying inert gas downward toward the impact plates. 
     
     
       39. The scrubber as claimed in  claim 1 , wherein the water reservoir tank comprises:
 a first region assembled under the burning chamber and the wet tower so as to capture water and particles which have dropped from the burning chamber and the wet tower, 
 a second region separated from the first region by a partition and supplied with particle-filtered water from the first region, and 
 a filtration section interposed between the first and second regions so as to filter particles from the water. 
 
     
     
       40. The scrubber as claimed in  claim 39 , wherein a drain pump is additionally connected to the first region for discharging the water and particles to the outside in unison. 
     
     
       41. The scrubber as claimed in  claim 40 , wherein the drain pump has fluid inlet and outlet ports so as to suction and discharge water and particles, and air inlet and outlet ports for supplying pneumatic pressure to the drain pump so as to operate the drain pump, at least one bubbler being connected to the air outlet port via a pipe and sinking to a predetermined depth in the water of the first region of the water reservoir tank. 
     
     
       42. The scrubber as claimed in  claim 41 , wherein the drain pump is a pneumatic diaphragm pump. 
     
     
       43. The scrubber as claimed in  claim 41 , wherein the bubbler is a noise reducer for reducing noise from the drain pump. 
     
     
       44. The scrubber as claimed in  claim 41 , wherein the bubbler gene-rates bubbles in the water contained in the water reservoir tank each time air is discharged from the drain pump, so that the particles captured in water continuously float in the water without depositing or accumulating on the bottom of the water reservoir tank. 
     
     
       45. The scrubber as claimed in  claim 41 , wherein the inlet port of a circulation pump is connected to the second region of the water reservoir tank, and the outlet port of the circulation pump is connected to the wet tower through a heat exchanger.