Small lot size lithography bays

Abstract

In a first aspect, a small lot size lithography bay is provided. The small lot size lithography bay includes (1) a plurality of lithography tools; and (2) a small lot size transport system adapted to transport small lot size substrate carriers to the lithography tools. Each small lot size substrate carrier is adapted to hold fewer than 13 substrates. Numerous other aspects are provided.

1. A method comprising:
 storing substrates in a plurality of small lot size substrate carriers, each adapted to hold a maximum capacity of 1, 2, 3, 4, 5, 6, or 7 substrates; and 
 transporting at least one of the small lot size substrate carriers adapted to hold a maximum capacity of 1, 2, 3, 4, 5, 6, or 7 substrates within a lithography bay of a semiconductor device fabrication facility; 
 wherein storing substrates in a plurality of small lot size substrate carriers each adapted to hold a maximum capacity of 1, 2, 3, 4, 5, 6, or 7 substrates comprises transferring substrates from a large lot size substrate carrier adapted to hold 13 or 25 substrates to a plurality of small lot size substrate carriers each adapted to hold less than a maximum capacity of 1, 2, 3, 4, 5, 6, or 7 substrates. 
 
   
   
     2. The method of  claim 1  wherein storing substrates in a plurality of small lot size substrate carriers, each adapted to hold a maximum capacity of 1, 2, 3, 4, 5, 6, or 7 substrates, comprises:
 (a) receiving a large lot size substrate carrier from a large lot size transport system, the large lot size substrate carrier adapted to store 13 or 25 substrates; and 
 (b) transferring substrates from the large lot size substrate carrier adapted to store 13 or 25 substrates to a plurality of small lot size substrate carriers each adapted to hold a maximum capacity of 1, 2, 3, 4, 5, 6, or 7 substrates. 
 
   
   
     3. The method of  claim 2  further comprising performing steps (a) and (b) at a stocker. 
   
   
     4. The method of  claim 3  further comprising storing the plurality of small lot size substrate carriers at the stocker. 
   
   
     5. The method of  claim 1  wherein the plurality of small lot size substrate carriers are each adapted to hold a maximum capacity 4 or less substrates. 
   
   
     6. The method of  claim 1  wherein the plurality of small lot size substrate carriers are each adapted to hold a maximum capacity 3 or less substrates. 
   
   
     7. The method of  claim 1  wherein the plurality of small lot size substrate carriers are each adapted to hold a maximum capacity 2 or less substrates. 
   
   
     8. The method of  claim 1  wherein the plurality of small lot size substrate carriers are each adapted to hold a maximum capacity 1 substrate. 
   
   
     9. The method of  claim 1  wherein transporting at least one of the small lot size substrate carriers within a lithography bay of a semiconductor device fabrication facility comprises transporting a small lot size substrate carrier to a patterning tool. 
   
   
     10. The method of  claim 9  further comprising patterning a substrate from the small lot size substrate carrier using the patterning tool. 
   
   
     11. The method of  claim 9  further comprising transferring the small lot size substrate carrier to a tool adapted to perform at least one of metrology and inspection. 
   
   
     12. The method of  claim 11  further comprising performing at least one of metrology and inspection on a substrate from the small lot size substrate carrier. 
   
   
     13. The method of  claim 12  further comprising transferring the small lot size substrate carrier to one or more re-work tools based on results of performing at least one of metrology and inspection. 
   
   
     14. The method of  claim 13  further comprising re-working a substrate from the small lot size substrate carrier. 
   
   
     15. The method of  claim 4  wherein re-working the substrate includes at least one of wet cleaning and dry stripping the substrate. 
   
   
     16. The method of  claim 1  further comprising transporting a plurality of small lot size substrate carriers to patterning tools in parallel. 
   
   
     17. The method of  claim 1  further comprising transporting a plurality of small lot size substrate carriers in parallel to different metrology tools. 
   
   
     18. The method of  claim 1  wherein transporting at least one of the small lot size substrate carriers within a lithography bay of a semiconductor device fabrication facility comprises employing a continuously moving conveyor to transport the at least one small lot size substrate carrier within the lithography bay. 
   
   
     19. A lithography bay comprising:
 a plurality of lithography tools; 
 a small lot size transport system adapted to transport small lot size substrate carriers between the lithography tools, wherein each small lot size substrate carrier is adapted to hold a maximum capacity of 1, 2, 3, 4, 5, 6, or 7 substrates; and 
 a stocker adapted to:
 (a) receive a large lot size substrate carrier from a large lot size transport system, the large lot size substrate carrier adapted to store 13 or 25 substrates; and 
 (b) transfer substrates from the large lot size substrate carrier adapted to store 13 or 25 substrates to a plurality of small lot size substrate carriers each adapted to hold a maximum capacity of 1, 2, 3, 4, 5, 6, or 7 substrates. 
 
 
   
   
     20. The lithography bay of  claim 19  wherein the lithography tools comprise patterning tools and at least one of metrology and inspection tools. 
   
   
     21. The lithography bay of  claim 19  wherein the lithography tools comprise at least one re-work tool. 
   
   
     22. The lithography bay of  claim 21  wherein the at least one re-work tool is in-line with other lithography tools. 
   
   
     23. The lithography bay of  claim 21  wherein the at least one re-work tool includes a wet cleaning tool and a dry stripping tool. 
   
   
     24. The lithography bay of  claim 19  wherein the stocker is adapted to store at least one of large lot size carrier adapted to store 13 or 25 substrates and at least one small lot size substrate carrier adapted to hold a maximum capacity of 1, 2, 3, 4, 5, 6, or 7 substrates. 
   
   
     25. The lithography bay of  claim 19  wherein the small lot size transport system is adapted to transport small lot size substrate carriers to the stocker. 
   
   
     26. The lithography bay of  claim 19  wherein the small lot size substrate carriers are each adapted to store a maximum capacity of 4 or less substrates. 
   
   
     27. The lithography bay of  claim 19  wherein the small lot size substrate carriers are each adapted to store a maximum capacity of 3 or less substrates. 
   
   
     28. The lithography bay of  claim 19  wherein the small lot size substrate carriers are each adapted to store a maximum capacity of 2 or less substrates. 
   
   
     29. The lithography bay of  claim 19  wherein the small lot size substrate carriers are each adapted to store a maximum capacity of 1 substrate. 
   
   
     30. A method comprising:
 storing substrates in a plurality of small lot size substrate carriers, each adapted to hold less than a maximum of 13 substrates; and 
 transporting at least one of the small lot size substrate carriers within a lithography bay of a semiconductor device fabrication facility; and 
 maintaining a predetermined work in progress level within the semiconductor device fabrication facility by:
 decreasing an average cycle time of high priority substrates within the lithography bay so as to approximately maintain the predetermined work in progress level; 
 
 wherein storing substrates in a plurality of small lot size substrate carriers comprises transferring substrates from a substrate carrier adapted to hold up to 25 substrates to a plurality of small lot size substrate carriers.