Imprinting apparatus and method for forming residual film on a substrate

Abstract

An imprinting apparatus and a method of the same which form a residual film including a uniform thickness all over a substrate. The imprinting apparatus includes a substrate support which supports a substrate which is coated with an imprint resin on an upper surface thereof, an imprint mold arranged on an upper side of the substrate support and which forms a predetermined pattern by molding the imprint resin coated on the substrate, a pressure roller which pressurizes the imprint mold to adhere closely to the substrate, a pressure roller control unit which controls the pressure roller to change a moving velocity and an applied pressure of the pressure roller according to a position of the imprint mold, and a resin curing unit which cures the imprint resin on the substrate.

1. An imprinting method comprising:
 coating an imprint resin on a substrate; 
 aligning an imprint mold on the imprint resin; 
 pressurizing the imprint mold by changing a moving velocity and an applied pressure of a pressure roller according to a position of the imprint mold; and 
 curing the imprint resin, 
 wherein pressurizing the imprint mold further comprises pressurizing the imprint mold by reducing the moving velocity of the pressure roller as the pressure roller goes from a pressure-starting point to a pressure-ending point. 
 
     
     
       2. An imprinting method comprising:
 coating an imprint resin on a substrate; 
 aligning an imprint mold on the imprint resin; 
 pressurizing the imprint mold by changing a moving velocity and an applied pressure of a pressure roller according to a position of the imprint mold; and 
 curing the imprint resin, 
 wherein pressurizing the imprint mold further comprises pressurizing the imprint mold by moving the pressure roller at a constant moving velocity from a pressure-starting point to a specified middle point and then reducing the moving velocity after the pressure roller passes the specified middle point to a pressure-ending point. 
 
     
     
       3. An imprinting method comprising:
 coating an imprint resin on a substrate; 
 aligning an imprint mold on the imprint resin; 
 pressurizing the imprint mold by changing a moving velocity and an applied pressure of a pressure roller according to a position of the imprint mold; and 
 curing the imprint resin 
 wherein pressurizing the imprint mold further comprises pressurizing the imprint mold by increasing the applied pressure of the pressure roller as the pressure roller goes from a pressure-starting point to a pressure-ending point. 
 
     
     
       4. The imprinting method of  claim 1 , wherein pressurizing the imprint mold further comprises increasing the applied pressure of the pressure roller as the pressure roller goes from the pressure-starting point to the pressure-ending point. 
     
     
       5. The imprinting method of  claim 1 , wherein coating the imprint resin on the substrate comprises coating the imprint resin by performing a spin coating method. 
     
     
       6. The imprinting method of  claim 5 , wherein coating the imprint resin further comprises coating the imprint resin at a coating rotation speed of more than approximately 1000 rpm. 
     
     
       7. The imprinting method of  claim 1 , wherein aligning the imprint mold comprises:
 adjusting a position of the imprint mold relative to the position of the substrate; and 
 tilting one side of the imprint mold to come into contact with the substrate. 
 
     
     
       8. The imprinting method of  claim 7 , wherein pressurizing the imprint mold comprises sequentially pressurizing the imprint mold by moving the pressure roller from a portion of the imprint mold coming in contact with the substrate in an opposite direction. 
     
     
       9. The imprinting method of  claim 1 , wherein curing the imprint resin comprises curing the imprint resin by irradiating ultraviolet rays to the imprint resin.