Substrate for biochip

Abstract

A substrate for biochips has a substrate surface having a reaction region capable of reacting with biological substances and a non-reaction region not reacting with the biological substances, sunken bottomed wells formed in the substrate surface, and a layer of a material capable of reacting with the biological substances having a surface exposed only at the bottoms of the bottomed wells, the exposed surface forming the reaction region.

1. A substrate for a biochip, wherein:
 the substrate comprises a silicon on insulator wafer including a first silicon layer, a silicon oxide layer disposed on the first silicon layer, and a second silicon layer disposed on the silicon oxide layer, 
 the silicon oxide layer treated for a capability of reacting with biological substances, 
 the second silicon layer does not react with the biological substances, 
 wherein a plurality of wells are formed in the second silicon layer, and 
 the silicon oxide layer capable of reacting with the biological substances is exposed at the bottoms of the plurality of wells. 
 
     
     
       2. The substrate of  claim 1 , wherein the exposed surface of said silicon oxide layer is silanized. 
     
     
       3. The substrate of  claim 1 , further comprising:
 the first layer having a surface to be hydroxylated; and 
 the second layer disposed on the first layer, the second layer having a plurality of wells reaching to the first layer and a plurality of grooves configured to fill the wells with a same solution. 
 
     
     
       4. The substrate of  claim 3 , wherein the first layer has higher hydrophilicity than the second layer. 
     
     
       5. The substrate of  claim 3 , wherein the first layer contains a silicon dioxide. 
     
     
       6. The substrate of  claim 3 , wherein the second layer contains a crystal silicon. 
     
     
       7. The substrate of  claim 3 , wherein the second layer contains a resin. 
     
     
       8. The substrate of  claim 3 , further comprising a biomolecule layer having a plurality of probe biomolecules linked to a plurality of hydroxyl groups to be introduced on the first layer. 
     
     
       9. The substrate of  claim 8 , wherein each of the probe biomolecules and each of the hydroxyl groups are linked by a silane coupling agent. 
     
     
       10. The substrate of  claim 8 , wherein each of the probe biomolecules contains a deoxyribonucleic acid. 
     
     
       11. The substrate of  claim 8 , wherein each of the probe biomolecules contains a ribonucleic acid. 
     
     
       12. The substrate of  claim 8 , wherein each of the probe biomolecules contains a peptide. 
     
     
       13. The substrate of  claim 8 , wherein each of the probe biomolecules contains a protein.