Method of fabricating a semiconductor device having a heat sink with an exposed surface

Abstract

A method includes: mounting a plurality of semiconductor elements on a substrate having wirings; connecting electrically electrodes of the semiconductor elements and the wirings; sealing the semiconductor elements with a resin, which is carried out by bringing a thermal conductor having a concavity and the substrate to be in contact with each other so that the semiconductor elements are positioned within the concavity and by filling the concavity with the resin; and separating respective semiconductor elements 1 . In the resin-sealing step, in a state where the thermal conductor is arranged with its concavity facing up and the concavity of the thermal conductor is filled with a liquid resin, the semiconductor elements are dipped in the liquid resin in the concavity and the liquid resin is solidified. Due to these steps, a semiconductor device can be manufactured without experiencing troubles such as short circuit of the metal thin wires or imperfect filling of resin during the manufacturing steps, and thus semiconductor devices with stable quality can be manufactured.

1. A method for manufacturing a semiconductor device, comprising:
 mounting a plurality of semiconductor elements on a substrate having wirings; 
 connecting electrically electrodes of the semiconductor elements and the wirings; 
 sealing the semiconductor elements with a resin, which is carried out by bringing a thermal conductor having a concavity and the substrate to be in contact with each other so that the semiconductor elements are positioned within the concavity and by filling the concavity with the resin; and 
 separating the respective semiconductor elements, 
 wherein in the resin-sealing step, in a state where the thermal conductor is arranged with its concavity facing up and the concavity of the thermal conductor is filled with a liquid resin, the semiconductor elements are dipped in the liquid resin in the concavity and the liquid resin is solidified. 
 
     
     
       2. The method for manufacturing a semiconductor device according to  claim 1 , wherein the state where the concavity of the thermal conductor is filled with the liquid resin is obtained by injecting the liquid resin into the concavity of the thermal conductor. 
     
     
       3. The method for manufacturing a semiconductor device according to  claim 1 , wherein the state where the concavity of the thermal conductor is filled with the liquid resin is obtained by casting a solid resin into the concavity of the thermal conductor and heating the thermal conductor so as to melt the solid resin. 
     
     
       4. The method for manufacturing a semiconductor device according to  claim 1 , wherein the thermal conductors before the separation step is provided as a group of joined thermal conductors, and the separation step is carried out by cutting the substrate and the thermal conductor group simultaneously. 
     
     
       5. The method for manufacturing a semiconductor device according to  claim 4 , wherein the thermal conductor group comprises the thermal conductors joined in a strip. 
     
     
       6. The method for manufacturing a semiconductor device according to  claim 4 , wherein the thermal conductor group comprises the thermal conductors joined in a matrix. 
     
     
       7. The method for manufacturing a semiconductor device according to  claim 4 , wherein the thermal conductor group has slits formed in the joints between the thermal conductors. 
     
     
       8. The method for manufacturing a semiconductor device according to  claim 1 , wherein the thermal conductor before the separation step is provided as a group of joined thermal conductors, and the separation step is carried out by cutting the substrate, the thermal conductor group and the sealing resin simultaneously. 
     
     
       9. The method for manufacturing a semiconductor device according to  claim 8 , wherein the thermal conductor group comprises the thermal conductors joined in a strip. 
     
     
       10. The method for manufacturing a semiconductor device according to  claim 8 , wherein the thermal conductor group comprises the thermal conductors joined in a matrix. 
     
     
       11. The method for manufacturing a semiconductor device according to  claim 8 , wherein the thermal conductor group has slits formed in the joints between the thermal conductors. 
     
     
       12. The method for manufacturing a semiconductor device according to  claim 1 , wherein the plural semiconductor elements are sealed simultaneously in the resin-sealing step. 
     
     
       13. A method for manufacturing a semiconductor device, comprising:
 mounting a plurality of semiconductor elements on a lead frame; 
 connecting electrically electrodes of the semiconductor elements and the lead frame; 
 sealing the semiconductor elements with a resin, which is carried out by bringing a thermal conductor having a concavity and the lead frame to be in contact with each other so that the semiconductor elements are positioned within the concavity and by filling the concavity with the resin; 
 separating the respective semiconductor elements, 
 wherein in the resin-sealing step, in a state where the thermal conductor is arranged with its concavity facing up and the concavity of the thermal conductor is filled with a liquid resin, the semiconductor elements are dipped in the liquid resin in the concavity and the liquid resin is solidified. 
 
     
     
       14. The method for manufacturing a semiconductor device according to  claim 13 , wherein the state where the concavity of the thermal conductor is filled with a liquid resin is obtained by injecting the liquid resin into the concavity of the thermal conductor. 
     
     
       15. The method for manufacturing a semiconductor device according to  claim 13 , wherein the state where the concavity of the thermal conductor is filled with the liquid resin is obtained by casting a solid resin into the concavity of the thermal conductor and heating the thermal conductor so as to melt the solid resin. 
     
     
       16. The method for manufacturing a semiconductor device according to  claim 13 , wherein the thermal conductor before the separation step is provided as a group of joined thermal conductors, and the separation step is carried out by cutting the lead frame and the thermal conductor group simultaneously. 
     
     
       17. The method for manufacturing a semiconductor device according to  claim 16 , wherein the thermal conductor group comprises the thermal conductors joined in a strip. 
     
     
       18. The method for manufacturing a semiconductor device according to  claim 16 , wherein the thermal conductor group comprises the thermal conductors joined in a matrix. 
     
     
       19. The method for manufacturing a semiconductor device according to  claim 16 , wherein the thermal conductor group has slits formed in the joints between the thermal conductors. 
     
     
       20. The method for manufacturing a semiconductor device according to  claim 13 , wherein the thermal conductor before the separation step is provided as a group of joined thermal conductors, and the separation step is carried out by cutting the lead frame, the thermal conductor group and the solidified resin simultaneously. 
     
     
       21. The method for manufacturing a semiconductor device according to  claim 20 , wherein the thermal conductor group comprises the thermal conductors joined in a strip. 
     
     
       22. The method for manufacturing a semiconductor device according to  claim 20 , wherein the thermal conductor group comprises the thermal conductors joined in a matrix. 
     
     
       23. The method for manufacturing a semiconductor device according to  claim 20 , wherein the thermal conductor group has slits formed in the joints between the thermal conductors. 
     
     
       24. The method for manufacturing a semiconductor device according to  claim 13 , wherein the plural semiconductor elements are sealed simultaneously in the resin-sealing step.