Gray scale mask

Abstract

A gray scale mask for fabricating a thin film transistor, comprising: a source mask region; a drain mask region; and a channel mask region between the source mask region and the drain mask region, wherein a plurality of light-blocking bars are arranged regularly in the channel mask region, and the light-blocking bars are perpendicular to a center line of the channel mask region.

1. A gray scale mask for fabricating a thin film transistor, comprising:
 a source mask region; 
 a drain mask region; and 
 a channel mask region between the source mask region and the drain mask region, wherein a plurality of light-blocking bars are arranged regularly in the channel mask region, and the light-blocking bars are perpendicular to a center line of the channel mask region, each of said source mask region and said drain mask region having a profile and wherein the center line of the channel mask region extends in parallel to the profiles of the source mask region and the drain mask region that face each other. 
 
     
     
       2. The gray scale mask according to  claim 1 , wherein ends of the plurality of light-blocking bars which contact the source mask region and the drain mask region are in a form of a wedge angle. 
     
     
       3. The gray scale mask according to  claim 2 , wherein the ends of the light-blocking bars contact with the source mask region and the drain mask region with an angle in a range of about 20° to 70°. 
     
     
       4. The gray scale mask according to  claim 2 , wherein the light-blocking bars have a width of about 1 μm to 3 μm. 
     
     
       5. The gray scale mask according to  claim 2 , wherein the light-blocking bars have a spacing of about 1 μm to 3 μm therebetween. 
     
     
       6. The gray scale mask according to  claim 1 , wherein the drain mask region is U-shaped, and an end of the source mask region is rectangular and extends into the U shaped drain mask region. 
     
     
       7. The gray scale mask according to  claim 1 , wherein each of the drain mask region and the source mask region has a rectangular end, and the end of the drain mask region and the end of the source mask region are arranged opposite to each other. 
     
     
       8. The gray scale mask according to  claim 1 , wherein the light-blocking bars is in a strip shape. 
     
     
       9. The gray scale mask according to  claim 1 , wherein ends of the plurality of light-blocking bars which contact the source mask region and the drain mask region are in a form of a trapezoid. 
     
     
       10. The gray scale mask according to  claim 9 , wherein the ends of the light-blocking bars contact with the source mask region and the drain mask region with an angle in a range of about 20° to 70°. 
     
     
       11. The gray scale mask according to  claim 9 , wherein the light-blocking bars have a width of about 1 μm to 3 μm. 
     
     
       12. The gray scale mask according to  claim 9 , wherein the light-blocking bars have a spacing of about 1 μm to 3 μm therebetween.