Cooling of reflective spatial light modulating devices

Abstract

An optical system as subject of the present invention comprises at least one packaged spatial light modulator comprising a front side for facing incident light. The optical system further comprises projection optics for projecting an image formed by the packaged spatial light modulator, there being a sealed gas space in between the front side of the packaged spatial light modulator. The optical system comprises a first heat transporting means being thermally coupled to the frontside of the packaged spatial light modulator, the first heat transporting means comprising a thermally conductive frame contacting the front side of the packaged spatial light modulator along an edge thereof. A second heat transporting means being thermally coupled to the package back side may be provided as well. The first and second heat transporting means are thermally separated by the package. The device may further comprise a control means for controlling the heat flow in at least one of the first heat transporting means and the second heat transporting means.

1. An optical system comprising at least one packaged spatial light modulator comprising a front side for facing incident light, projection optics for projecting an image formed by the packaged spatial light modulator, a sealed gas space in between the front side of the packaged spatial light modulator and the projection optics, and first heat transporting means being thermally coupled to the front side of the spatial light modulator, the first heat transporting means comprising a thermally conductive frame contacting the front side of the packaged spatial light modulator along an edge thereof. 
     
     
       2. An optical system according to  claim 1 , the at least one packaged spatial light modulator comprising a back side, the optical system furthermore comprising a second heat transporting means thermally coupled to the back side of the at least one packaged spatial light modulator. 
     
     
       3. An optical system according to  claim 2 , wherein the first and second heat transporting system are thermally separated from each other by the packaged spatial light modulator. 
     
     
       4. An optical system according to  claim 2 , wherein second heat transporting means further comprises an active cooling device. 
     
     
       5. An optical system according  claim 1 , furthermore comprising a control means for controlling the heat flow in at least one of the first heat transporting means and the second heat transporting means. 
     
     
       6. An optical system according to  claim 5 , wherein a control means is for controlling the heat flow in the second heat transporting means, independently of the heat flow in the first heat transporting means. 
     
     
       7. An optical system according to  claim 5 , wherein the control means is suitable for controlling the heat flow in the first heat transporting means, independently of the heat flow in the second heat transporting means. 
     
     
       8. An optical system according to  claim 5 , comprising at least two packaged spatial light modulators, wherein the control means for controlling the heat flow in at least one of the first heat transporting means and the second heat transporting means is adapted for controlling one of the first of second heat transporting means independently from any other of the first or second heat transporting means. 
     
     
       9. An optical system according to  claim 1 , wherein the first heat transporting means furthermore comprises at least one heat pipe, thermally coupled to the thermally conductive frame. 
     
     
       10. An optical system according to  claim 9 , wherein the first heat transporting means further comprises an active cooling device, said heat pipe being coupled to the active cooling device. 
     
     
       11. An optical system according to  claim 1 , wherein said thermally conductive frame is provided out of highly thermally conductive material such as a metal. 
     
     
       12. An optical system according to  claim 1 , wherein said thermally conductive frame is provided out of a material from the group consisting of copper, copper alloy, aluminium, aluminium alloy and thermally conductive ceramic. 
     
     
       13. An projection device comprising an optical system according to  claim 1 .