Flexible force sensor with coupling type and multi-directional recognitions

Abstract

A force sensor includes a substrate, a support layer, a film, a plurality of sensing portions, a plurality of electrodes, a plurality of sensing materials, and a filler. The support layer is disposed on the substrate. The film is supported by the support layer. The sensing portions extend from the film. The electrodes are correspondingly disposed on the sensing portions. The sensing materials are correspondingly disposed on the electrodes. The support layer, the film, the sensing portions, the electrodes, and the sensing materials encapsulated by the filler.

1. A force sensor, comprising:
 a flexible substrate; 
 a support layer disposed on the flexible substrate; 
 a film supported by the support layer; 
 a plurality of sensing portions extending from the film; 
 a plurality of electrodes correspondingly disposed on the plurality of sensing portions; 
 a plurality of sensing materials correspondingly disposed on the plurality of electrodes; and 
 a filler encapsulating the support layer, the film, the plurality of sensing portions, the plurality of electrodes, and the plurality of sensing materials. 
 
     
     
       2. The flexible force sensor as claimed in  claim 1 , wherein the plurality of sensing portions is provided in pair. 
     
     
       3. The flexible force sensor as claimed in  claim 1 , wherein the plurality of sensing portions is curved. 
     
     
       4. The flexible force sensor as claimed in  claim 3 , further comprising a support which is disposed on the flexible substrate and supports the plurality of sensing portions. 
     
     
       5. The flexible force sensor as claimed in  claim 4 , wherein the support is hemispherical, rectangular, or polygonal. 
     
     
       6. The flexible force sensor as claimed in  claim 1 , wherein the plurality of sensing materials is made of resistance material, piezoresistive material, piezoelectric material, inductance material, electromagnetic material, or thermoelectric material. 
     
     
       7. The flexible force sensor as claimed in  claim 1 , further comprising a plurality of bumps correspondingly connected to tops of the plurality of sensing portions. 
     
     
       8. The flexible force sensor as claimed in  claim 7 , wherein the plurality of bumps is hemispherical, rectangular, or polygonal. 
     
     
       9. The flexible force sensor as claimed in  claim 1 , wherein the filler and the support are made of the same polymer.