Ultrasound transducer manufactured by using micromachining process, its device, endoscopic ultrasound diagnosis system thereof, and method for controlling the same

Abstract

An ultrasound transducer manufactured by using a micromachining process comprises: a first electrode into which a control signal for transmitting ultrasound is input; a substrate on which the first electrode is formed; a second electrode that is a ground electrode facing the first electrode with a prescribed space between the first and second electrodes; a membrane on which the second electrode is formed and which vibrates and generates the ultrasound when a voltage is applied between the first and second electrodes; a piezoelectric film contacting the membrane; and a third electrode electrically continuous to the piezoelectric film.

1. An ultrasound transducer manufactured by using a micromachining process, comprising:
 a first electrode into which a control signal for transmitting ultrasound is input; 
 a substrate on which the first electrode is formed; 
 a second electrode facing the first electrode; 
 a membrane on which the second electrode is formed and which vibrates and generates the ultrasound when voltage is applied between the first and second electrodes; 
 a supporting member formed by a first piezoelectric film, the supporting member supporting the membrane; and 
 a third electrode jointed to the supporting member. 
 
     
     
       2. The ultrasound transducer according to  claim 1 , wherein: the supporting member supports the membrane via the second electrode. 
     
     
       3. The ultrasound transducer according to  claim 1 , wherein:
 a second piezoelectric film and the second electrode are stacked and arranged in sequence on an upper surface side of the membrane; 
 the third electrode is stacked and arranged on a bottom surface side of the membrane; and 
 the third electrode has a control signal input to it, wherein the control signal controls an operation of the first piezoelectric film forming the supporting member. 
 
     
     
       4. The ultrasound transducer according to  claim 3 , wherein:
 the first piezoelectric film as the supporting member supports an end of the membrane; and 
 when ultrasound that has been received by the membrane is converted into a pulse signal by the second piezoelectric film, damping is performed on a tailing portion of the pulse signal by applying to the third electrode the control signal for canceling the tailing portion of the pulse signal.