Method and solution for forming a patterned ferroelectric layer on a substrate

Abstract

A method for forming a patterned ferroelectric layer, having ferroelectric electronic properties, on a substrate. A composite layer, made of ferroelectric layer producing metal acrylate compounds, a photoinitiator compound and an acrylate crosslinking compound is formed on the substrate. A photomask is formed on the composite layer. Unmasked areas of the composite layer are irradiated with ultraviolet light. A solvent removes non-irradiated areas of the composite layer from the substrate. The patterned composite layer is heated in an oxygen atmosphere to cause a chemical reaction among the ferroelectric layer producing metal acrylate compounds and oxygen, a patterned ferroelectric layer being formed on the substrate.

1. A method for forming a patterned ferroelectric layer on a substrate, comprising:
 (a) forming a composite layer on a substrate, the composite layer comprising bismuth methacrylate, strontium methacrylate and tantalum dimethacrylate metal acrylate compounds, a photoinitiator compound and an acrylate crosslinking compound; 
 (b) placing a photomask onto the composite layer, the photomask having areas that are transparent to ultraviolet light; 
 (c) irradiating the composite layer, through the photomask, with ultraviolet light; 
 (d) placing a solvent on the irradiated composite layer to remove non-irradiated areas of the composite layer from the substrate, a patterned composite layer being formed on the substrate; and 
 (e) heating the patterned composite layer in an oxygen atmosphere to cause a chemical reaction among the bismuth methacrylate, strontium methacrylate and tantalum dimethacrylate metal acrylate compounds and oxygen, a patterned ferroelectric layer being formed on the substrate. 
 
     
     
       2. A method for forming a patterned ferroelectric layer on a substrate, comprising:
 (a) depositing a solution onto a substrate, the solution comprising bismuth methacrylate, strontium methacrylate and tantalum dimethacrylate metal acrylate compounds, a photoinitiator compound, an acrylate crosslinking compound and a solvent; 
 (b) heating the solution and the substrate, to drive solvent from the deposited solution, a composite layer being formed on the substrate; 
 (c) placing a photomask onto the composite layer, the photomask having areas that are transparent to ultraviolet light; 
 (d) irradiating the composite layer, through the photomask, with ultraviolet light; 
 (e) placing a solvent on the irradiated composite layer to remove non-irradiated areas of the composite layer from the substrate, a patterned composite layer being formed on the substrate; and 
 (f) heating the patterned composite layer in an oxygen atmosphere to cause a chemical reaction among the bismuth methacrylate, strontium methacrylate and tantalum dimethacrylate metal acrylate compounds and oxygen, a patterned ferroelectric layer being formed on the substrate. 
 
     
     
       3. A method for forming a patterned ferroelectric layer on a substrate, comprising:
 (a) depositing a solution onto a substrate, the solution comprising bismuth methacrylate, strontium methacrylate, tantalum dimethacrylate, benzildimethylketal, triethylenglycol dimethacrylate, glyceryl tri-2-ethylhexanoate, and methoxyethoxy alcohol; 
 (b) heating the solution and the substrate, to drive solvent from the deposited solution, a composite layer being formed on the substrate; 
 (c) placing a photomask onto the composite layer, the photomask having areas that are transparent to ultraviolet light; 
 (d) irradiating the composite layer, through the photomask, with ultraviolet light; 
 (e) placing a solvent on the irradiated composite layer to remove non-irradiated areas of the composite layer from the substrate, a patterned composite layer being formed on the substrate; and 
 (f) heating the patterned composite layer in an oxygen atmosphere to cause a chemical reaction among the bismuth methacrylate, strontium methacrylate, tantalum dimethacrylate and oxygen, a patterned ferroelectric layer being formed on the substrate.