Transport device with a monitoring appliance and substrate treatment apparatus

Abstract

In a transport device, which comprises at least one endless conveyor guided around at least two guide rollers, a monitoring appliance for monitoring motion of a guide roller is positioned on at least one of the guide rollers. The monitoring appliance comprises a first contact element disposed on and electrically connected with the guide roller, and a second contact element disposed near the guide roller. The first and second contact elements are arranged relative to one another in such a way that an electrical contact between them occurs with every revolution of the guide roller, such that the electric potential of the guide roller is transmitted to the second contact element. Additionally, a substrate treatment apparatus comprising such transport device is disclosed.

1. Transport device, including at least two deflection rolls; at least one endless conveyor device wrapped around the at least two deflection rolls; and a monitoring device is provided on at least one deflection roll of said at least two deflection rolls to monitor movement of the deflection roll, the monitoring device including a first contact element connected physically and electrically conducting to the deflection roll and arranged on the deflection roll, as well as a second contact element arranged next to the deflection roll, the first and second contact elements being arranged relative to each other, so that during each revolution of the deflection roll, electrical contact occurs intermittently between the first contact element and the second contact element, so that electrical potential of the deflection roll is transferred to the second contact element to monitor movement of the deflection roll. 
     
     
       2. Transport device according to  claim 1 , wherein the first contact element is mounted on a side surface of the deflection roll, so that the first contact element describes a circular path during operation of the transport device. 
     
     
       3. Transport device according to  claim 2 , wherein the second contact element is arranged parallel to an axis of rotation of the deflection roll, so that by friction between the first contact element and the second contact element during each revolution of the deflection roll, undesired layers are removed from the first contact element. 
     
     
       4. Transport device according to  claim 1 , wherein the first contact element is a spring steel sheet arranged on the deflection roll. 
     
     
       5. Transport device according to  claim 1 , wherein the second contact element is a flexible steel pin mounted in a holder electrically insulated from the deflection roll. 
     
     
       6. Transport device according to  claim 5 , wherein the flexible steel pin is a section of a stainless steel cable. 
     
     
       7. Transport device according to  claim 1 , further including an evaluation device, wherein the evaluation device is electrically connected to the second contact element to record the electrical potential of the deflection roll and monitor the movement of the deflection roll. 
     
     
       8. Device for vacuum treatment of substrates, including at least one treatment device; a transport device for transport of the substrates being treated to the treatment device; wherein the transport device includes at least two deflection rolls; at least one endless conveyor device wrapped around the at least two deflection rolls; and a monitoring device provided on at least one deflection roll to monitor movement of the deflection roll, the monitoring device includes a first contact element connected physically and electrically conducting to the deflection roll and arranged on the deflection roll, as well as a second contact element arranged next to the deflection roll, the first and second contact elements being arranged relative to each other, so that during each revolution of the deflection roll, electrical contact occurs intermittently between the first contact element and the second contact element, so that electrical potential of the deflection roll is transferred to the second contact element to monitor movement of the deflection roll. 
     
     
       9. Device according to  claim 8 , further comprising an evaluation device to record the electrical potential of the deflection roll and monitor the movement of the deflection roll. 
     
     
       10. Device according to  claim 8 , wherein the treatment device comprises a vacuum coating or dry etching device. 
     
     
       11. Device according to  claim 8 , wherein the at least one endless conveyor device comprises at least one endless cable.