Oscillator, oscillator array and an electronic apparatus

Abstract

A oscillator include: a vibrator that vibrates in a thickness shear vibration mode; a first adsorption film formed in a first region in a first surface of the vibrator; a second adsorption film formed in a second region in a second surface of the vibrator opposing to the first surface; and a substrate with a surface on which the vibrator is erected, wherein the vibrator contacts the substrate in a third surface that is different from the first surface and the second surface.

1. An oscillator comprising:
 a vibrator that vibrates in a thickness shear vibration mode; 
 a first adsorption film formed in a first region on a first surface of the vibrator; 
 a second adsorption film formed in a second region on a second surface of the vibrator opposing to the first surface; and 
 a substrate with a surface on which the vibrator is erected, 
 wherein a third surface of the vibrator that is different from the first surface and the second surface contacts the substrate. 
 
     
     
       2. An oscillator according to  claim 1 , wherein the vibrator is equipped with a first electrode formed in the first region between the vibrator and the first adsorption film and a second electrode formed in the second region between the vibrator and the second adsorption film. 
     
     
       3. An oscillator according to  claim 1 , wherein the vibrator is equipped with a first electrode formed in the first surface in a third region that contacts the substrate and does not overlap the first region and a second electrode formed in the second surface in a fourth region that contacts the substrate and does not overlap the second region. 
     
     
       4. An oscillator according to  claim 2 , wherein the vibrator is further equipped with an integrated circuit including an oscillation circuit mounted on a back surface of the substrate, wherein the first electrode and the second electrode are connected to the integrated circuit respectively through wirings passing through the substrate. 
     
     
       5. An oscillator according to  claim 1 , wherein the vibrator is fitted in a groove provided in the substrate. 
     
     
       6. An oscillator according to  claim 1 , wherein the vibrator is erected on a sloped surface provided in the substrate. 
     
     
       7. An oscillator according to  claim 1 , wherein the vibrator has an inverted mesa structure having a recess in one of the surfaces. 
     
     
       8. An oscillator array comprising a plurality of the vibrators in plurality recited in  claim 1 . 
     
     
       9. An oscillator array according to  claim 8 , wherein the plural vibrators are arranged to extend on the substrate such that manners of alignments of the vibrators in a first direction exist in plurality with respect to a second direction perpendicular to the first direction, and normal directions to the vibrators in adjacent ones of the rows are in different orientations. 
     
     
       10. An electronic apparatus comprising the oscillator recited in  claim 1 . 
     
     
       11. An electronic apparatus comprising the oscillator array recited in  claim 8 .