Probe device having a structure for being prevented from deforming

Abstract

A reinforcing member is formed at a top surface side of a probe card including a support plate for supporting a contactor and a circuit board. A plurality of long guide holes are formed in an outer peripheral portion of the reinforcing member. Fixing members fixed to a holding member and collars formed around outer circumferences of the fixing members are formed in the guide holes. A length in a longitudinal direction of each of the guide holes is greater than a diameter of each of the collars, and a central line in the longitudinal direction of each of the guide holes passes through a center of the reinforcing member. Due to the guide holes, horizontal expansion of the reinforcing member itself is allowed.

1. A probe device which inspects electrical characteristics of an object to be inspected, the probe device comprising:
 a probe card comprising a support plate which supports a contactor that contacts the object to be inspected, and a circuit board disposed at a top surface side of the support plate; 
 a reinforcing member having a part which is disposed at a top surface side of the circuit board and which reinforces the circuit board; 
 a holding member which holds an outer peripheral portion of the reinforcing member, 
 wherein fixing members are inserted into guide holes, and are fixed to the holding member, 
 the guide holes are formed to pass through the outer peripheral portion of the reinforcing member in a thickness direction of the reinforcing member such that the guide holes guide the reinforcing member when the reinforcing member horizontally extends or contracts, 
 a length in a longitudinal direction of each of the guide holes is greater than a diameter of each of the fixing members when viewed from a plane, 
 a central line passing through a center of each of the guide holes in the longitudinal direction passes through a center of the reinforcing member when viewed from a plane, and 
 in the guide holes, the outer peripheral portion of the reinforcing member is vertically spaced apart from the fixing members. 
 
     
     
       2. The probe device of  claim 1 , wherein each of the fixing members has a flange portion formed at an upper portion of each of the fixing members, and
 a stepped portion which engages the flange portion formed along an inner circumference of each of the guide holes. 
 
     
     
       3. The probe device of  claim 1 , wherein a collar is formed around an outer circumference of each of the fixing members,
 the collar has an other flange portion formed at an upper portion of the collar, 
 a stepped portion which engages the other flange portion is formed along an inner circumference of each of the guide holes, and 
 a distance between a lower surface of the other flange portion and an upper surface of the holding member is greater than a distance between the stepped portion and the upper surface of the holding member. 
 
     
     
       4. The probe device of  claim 1 , wherein the guide holes are formed at 45- or 90-degree intervals along a same circumference about the center of the reinforcing member when viewed from a plane.