Method and program for operating test apparatus

Abstract

Disclosed is a method for operating a test apparatus in which the testing efficiency is drastically increased. The test apparatus has a plurality of stages for testing wafers by using operation buttons displayed on the operating screens of each of a plurality of monitors. Exclusion condition buttons for excluding operation buttons are set in at least one monitor using exclusion condition data prepared by combining data required to perform various functions of the test apparatus and an exclusion condition pattern prepared by combining the exclusion condition of the exclusion condition data into data for deciding whether the operating button configured to operate each function can be pressed or not. Also, display of the screen that satisfies the exclusion condition for at least one monitor is prevented.

1. A method for operating a test apparatus having a plurality of stages for testing wafers by using an operation button in an operation screen displayed on each of a plurality of monitors, comprising:
 providing exclusion condition data that combines functional data required for operating various functions of the test apparatus into an exclusion condition, and an exclusion condition pattern that combines the exclusion condition into data for determining whether the operating button configured to operate each function can be pressed or not, 
 providing an exclusion condition button to one or more monitors for excluding the operation button according to an operating condition of the test apparatus, 
 determining the exclusion condition of the exclusion condition button with reference to the exclusion condition data and the exclusion condition pattern by pressing the exclusion condition button, and 
 preventing a screen satisfying the exclusion condition on the one or more monitors from being displayed on other monitors based on the determining. 
 
     
     
       2. The method according to  claim 1 , wherein each of the monitors displays a plurality of stage screens, each of which is assigned to each stage, and a main screen in addition to the stage screens. 
     
     
       3. The method according to  claim 2 , wherein an operation mode is displayed on each of the stage screens and main screen, and the operation mode includes an operator mode used for testing semiconductor wafers and a system mode used for conducting a predetermined operation while stopping a selected stage. 
     
     
       4. The method according to  claim 3 , wherein, when the system mode is displayed on the one or more monitors, the other monitors do not display the system mode. 
     
     
       5. A computer-readable recording medium storing a computer executable program that, when executed, causes a computer to perform the method of  claim 1  for operating a test apparatus having a plurality of stages for testing electrical characteristics of semiconductor wafers.