Manifold made from amorphous resin

Abstract

A manifold comprises a base material section made from an amorphous resin, a solenoid valve section including a plurality of solenoid valves made up of valve bodies, and a coupling section including a plurality of pipe couplings. The overall surface of the base material section is covered in a surrounding fashion without pinholes by a protective film, which is a dense layer film made from a chemically stable material. The manifold is surrounded by a protective box as necessary.

1. A manifold through which a fluid flows, comprising:
 a base material section made from an amorphous resin in which plural fluid passages are formed in an interior thereof; 
 a solenoid valve section disposed on the base material section for controlling introduction and discharging of fluid to and from the fluid passages; and 
 a coupling section that communicates with the fluid passages of the base material section and through which introduction and discharging of fluid is carried out, 
 wherein the base material section is covered in a surrounding fashion by a protective film. 
 
     
     
       2. The manifold according to  claim 1 , wherein the manifold is covered by a protective box. 
     
     
       3. The manifold according to  claim 2 , wherein the manifold is pressurized by an inert gas introduced into the protective box. 
     
     
       4. The manifold according to  claim 3 , wherein the protective box includes an inlet passage through which the inert gas is introduced to an interior of the protective box, and an outlet passage through which the introduced inert gas is discharged. 
     
     
       5. The manifold according to  claim 3 , wherein the base material section includes an inlet passage through which the inert gas is introduced to an interior of the protective box, and an outlet passage through which the introduced inert gas is discharged, the inlet passage and the outlet passage being connected to the coupling section. 
     
     
       6. The manifold according to  claim 2 , wherein the protective box is constructed from a bottom plate disposed on a lower part of the base material section, and a protective cover disposed on an upper part of the bottom plate. 
     
     
       7. The manifold according to  claim 1 , wherein the base material section is constituted by a plurality of stacked substrates having grooves therein that make up the fluid passages. 
     
     
       8. The manifold according to  claim 1 , wherein the base material section is made from an acrylic resin. 
     
     
       9. The manifold according to  claim 1 , wherein the protective film is formed from a fluorine based coating agent.