Substrate processing system, group managing apparatus, and method of analyzing abnormal state

Abstract

A maintenance engineer can analyze an abnormal state with less difficulty in a rapid and correct manner independent of his/her skill. A substrate processing system comprises: a substrate processing apparatus configured to operate according to a recipe defining a process sequence and process conditions, and a group managing apparatus connected to the substrate processing apparatus. The group managing apparatus comprises an analysis support unit. The analysis support unit is configured to extract check item information relating to both abnormal state information for indentifying an abnormal state occurring when the recipe is executed and apparatus type information for identifying the type of the substrate processing apparatus at which the abnormal state occurs, and to prepare a check item table comprising the extracted check item information.

What is claimed is: 
     
       1. A substrate processing system comprising:
 a substrate processing apparatus configured to operate according to a recipe defining a process sequence and process conditions; and 
 a group managing apparatus connected to the substrate processing apparatus, 
 wherein the group managing apparatus comprises: 
 a storage unit configured to store apparatus type information specifying a type of the substrate processing apparatus in an abnormal state in relation to apparatus information indicating the substrate processing apparatus is in the abnormal state, and check item information specifying a check item necessary for analyzing a cause of the abnormal state related to the apparatus type information and abnormal state information specifying the abnormal state occurring during execution of the recipe; and 
 an analysis support unit configured to receive basic information comprising the abnormal state information and the apparatus information, acquire the apparatus type information related to the apparatus information by referring to the storage unit, extract the check item information related to the apparatus type information and the abnormal state information, and prepare a check item table comprising the extracted check item information. 
 
     
     
       2. The substrate processing system of  claim 1 , further comprising:
 a communication unit configured to receive data indicating a progress state of the recipe or a state of the substrate processing apparatus from the substrate processing apparatus, 
 wherein the data received by the communication unit is stored in the storage unit in relation to recipe information specifying the recipe executed by the substrate processing apparatus when the data is generated, time information specifying a generation time of the data, and the check item information. 
 
     
     
       3. The substrate processing system of  claim 2 , wherein the group managing apparatus stores recipe information specifying a repeatedly executed recipe, and production history information specifying at least a start time and an end times of the recipe. 
     
     
       4. The substrate processing system of  claim 3 , wherein the group managing apparatus is configured to:
 acquire the start time and the end time of the recipe from the production history information; 
 read the data generated during a period between the start time and the end times of the recipe and related to the recipe information and the check item information from the storage unit; and 
 draw a time-series graph from the data based on time information specifying a generation time of the data by arranging the start times of the recipe. 
 
     
     
       5. The substrate processing system of  claim 4 , wherein the group managing apparatus displays a check mark to indicate completion of displaying of the time-series graph when the displaying of the time-series graph is completed. 
     
     
       6. A group managing apparatus connected to a substrate processing apparatus configured to operate according to a recipe defining a process sequence and process conditions, the group managing apparatus comprising:
 a storage unit configured to store apparatus type information specifying a type of the substrate processing apparatus in an abnormal state in relation to apparatus information indicating the substrate processing apparatus is in the abnormal state, and check item information specifying a check item necessary for analyzing a cause of the abnormal state related to the apparatus type information and abnormal state information specifying in the abnormal state occurring during execution of the recipe; and 
 an analysis support unit configured to receive basic information comprising the abnormal state information and the apparatus information, acquire the apparatus type information related to the apparatus information by referring to the storage unit, extract the check item information related to the apparatus type information and the abnormal state information, and prepare a check item table comprising the extracted check item information. 
 
     
     
       7. The group managing apparatus of  claim 6 , further comprising:
 a communication unit configured to receive data indicating a progress state of the recipe or a state of the substrate processing apparatus from the substrate processing apparatus, 
 wherein the data received by the communication unit is stored in the storage unit in relation to recipe information specifying the recipe executed by the substrate processing apparatus when the data is generated, time information specifying a generation time of the data, and the check item information. 
 
     
     
       8. The group managing apparatus of  claim 7 , wherein the group managing apparatus stores recipe information specifying a repeatedly executed recipe, and production history information specifying at least a start time and an end times of the recipe. 
     
     
       9. The group managing apparatus of  claim 8 , wherein the group managing apparatus is configured to:
 acquire the start time and the end time of the recipe from the production history information; 
 read the data generated during a period between the start time and the end times of the recipe and related to the recipe information and the check item information from the storage unit; and 
 draw a time-series graph from the data based on time information specifying a generation time of the data by arranging the start times of the recipe. 
 
     
     
       10. The group managing apparatus of  claim 9 , wherein the group managing apparatus displays a check mark to indicate completion of the displaying of the time-series graph when displaying of the time-series graph is completed. 
     
     
       11. A method of analyzing an abnormal state of a substrate processing apparatus, the method comprising:
 storing apparatus type information specifying a type of the substrate processing apparatus in an abnormal state in relation to apparatus information indicating the substrate processing apparatus is in the abnormal state and check item information specifying a check item necessary for analyzing a cause of the abnormal state related to the apparatus type information and abnormal state information specifying the abnormal state occurring during execution of the recipe; 
 receiving basic information comprising the abnormal state information and the apparatus information; 
 acquiring the apparatus type information related to the apparatus information by referring to the storage unit; 
 extracting the check item information related to the apparatus type information and the abnormal state information; and 
 preparing a check item table comprising the extracted check item information.