Micromechanical component, optical device, manufacturing method for a micromechanical component, and manufacturing method for an optical device

Abstract

A micromechanical component is described having a component which has a moth-eye structure which covers at least a partial surface of the component. At least a portion of the partial surface, as a first contact surface, may contact a contact component of the micromechanical component on at least one second contact area of the contact component, which has a needle-shaped microstructure, the moth-eye structure of the first contact area and the needle-shaped microstructure of the second contact area being at least partially interlocked with one another. Alternatively or additionally, at least a portion of the partial surface may be at least one partial area of an outer side and/or of an exposed inner side, facing the inner space, of the component configured as a light window. Also described is an optical device having such a micromechanical component, a manufacturing method for a micromechanical component, and a manufacturing method for an optical device.

What is claimed is: 
     
       1. A micromechanical component, comprising:
 a moth-eye structure having a microstructure including a plurality of structural units, each one of which having a dimension smaller than a wavelength of an incident light; and 
 a component having the moth-eye structure, which covers at least a partial surface of the component. 
 
     
     
       2. The micromechanical component of  claim 1 , wherein the moth-eye structure is made of an amorphous material. 
     
     
       3. A micromechanical component, comprising:
 a moth-eye structure; and 
 a component having the moth-eye structure, which covers at least a partial surface of the component, wherein at least a portion of the partial surface, as a first contact area, contacts a contact component of the micromechanical component on at least one second contact area of the contact component, which has a needle-shaped microstructure, and the moth-eye structure of the first contact area and the needle-shaped microstructure of the second contact area being at least partially interlocked with one another. 
 
     
     
       4. The micromechanical component of  claim 3 , wherein the needle-shaped microstructure is made of a crystalline semiconductor material. 
     
     
       5. The micromechanical component of  claim 1 , wherein the component is a light window and is made, at least partially, of a transparent material, and is configured as a subunit of a housing of the micromechanical component, which has an inner space. 
     
     
       6. The micromechanical component of  claim 5 , wherein at least one of a mirror device, a light detector, a beam splitter, a lens, an actuator device, and a sensor device is situated in the inner space. 
     
     
       7. The micromechanical component of  claim 5 , wherein at least a portion of the partial surface is at least a partial area of at least one of an outer side and an exposed inner side, facing the inner space, of the component configured as a light window. 
     
     
       8. An optical device, comprising:
 a light-emitting device; and 
 a micromechanical component, including:
 a moth-eye structure having a microstructure including a plurality of structural units, each one of which having a dimension smaller than a wavelength of an incident light; and 
 a component having the moth-eye structure, which covers at least a partial surface of the component, 
 wherein the component is a light window and is made, at least partially, of a transparent material, and is configured as a subunit of a housing of the micromechanical component, which has an inner space, and 
 wherein at least a portion of the partial surface is at least a partial area of at least one of an outer side and an exposed inner side, facing the inner space, of the component configured as a light window; 
 
 wherein the light-emitting device and the micromechanical component are situated and aligned with respect to one another so that a light beam emitted by the light-emitting device strikes the partial surface. 
 
     
     
       9. A manufacturing method for a micromechanical component, the method comprising:
 providing a micromechanical component; and 
 situating a component having a moth-eye structure, which covers at least a partial surface of the component, on or in the micromechanical component, the moth-eye structure having a microstructure including a plurality of structural units, each one of which having a dimension smaller than a wavelength of an incident light. 
 
     
     
       10. A manufacturing method for a micromechanical component, the method comprising:
 providing a micromechanical component; and 
 situating a component having a moth-eye structure, which covers at least a partial surface of the component, on or in the micromechanical component, wherein for situating the component on or in the micromechanical component, at least a portion of the partial surface, as a first contact surface, is brought into contact with a contact component of the micromechanical component on at least one second contact surface of the contact component, which has a needle-shaped microstructure, and the moth-eye structure of the first contact area and the needle-shaped microstructure of the second contact area being at least partially interlocked with one another. 
 
     
     
       11. A manufacturing method for an optical device, the method comprising:
 performing one of the following:
 (i) performing the following:
 situating a light-emitting device in the optical device; and 
 manufacturing a micromechanical component by providing a micromechanical component, and by situating a component having a moth-eye structure, which covers at least a partial surface of the component, on or in the micromechanical component; and situating the manufactured micromechanical component in the optical device; or 
 
 (ii) performing the following:
 situating a micromechanical component in the optical device, wherein the micromechanical component includes: 
 a moth-eye structure; and
 a component having the moth-eye structure, which covers at least a partial surface of the component, wherein the component is a light window and is made, at least partially, of a transparent material, and is configured as a subunit of a housing of the micromechanical component, which has an inner space, and 
 wherein at least a portion of the partial surface is at least a partial area of at least one of an outer side and an exposed inner side, facing the inner space, of the component configured as a light window; in the optical device; 
 
 
 
 wherein the light-emitting device and the micromechanical component are situated and aligned with respect to one another so that a light beam emitted by the light-emitting device strikes the partial surface.