Liquid ejecting head and liquid ejecting apparatus

Abstract

A liquid ejecting head includes a flow channel forming substrate having a pressure generation chamber communicating with a nozzle opening and arranged in parallel along a lateral direction. A piezoelectric element is provided on one surface of the flow channel forming substrate in correspondence to the pressure generation chamber, and has a first electrode, a piezoelectric layer provided on the first electrode and a second electrode provided on the piezoelectric layer. In a direction intersecting with the arrangement direction of the pressure generation chamber, in boundaries between an active section that is a substantial driving section and an inactive section that is not a substantial driving section of the piezoelectric layer of the first electrode, an opening group is provided including at least one opening in the active section and the inactive section.

What is claimed is: 
     
       1. A liquid ejecting head comprising:
 a flow channel forming substrate having a pressure generation chamber communicating with a nozzle opening; and 
 a piezoelectric element having a first electrode, a piezoelectric layer provided above the first electrode and a second electrode provided above the piezoelectric layer, 
 wherein in a direction intersecting with the arrangement direction of the pressure generation chamber, in boundaries between an active section that is a substantial driving section and inactive sections that are not a substantial driving section of the piezoelectric layer of the first electrode, there is provided an opening group located in the first electrode, wherein the opening group includes at least one opening that is continuous across the boundary between the active and inactive sections such that the one opening is partially within the active section and the inactive section or wherein the opening group includes at least one opening in the active region and at least one opening in the inactive region. 
 
     
     
       2. The liquid ejecting head according to  claim 1 , wherein the opening group is provided such that an aperture ratio thereof with respect to unit area of the surface of the first electrode is gradually increased toward the inactive section side from the active section. 
     
     
       3. The liquid ejecting head according to  claim 1 , wherein the opening group includes two openings or more. 
     
     
       4. The liquid ejecting head according to  claim 1 , wherein in the direction intersecting with the arrangement direction of the pressure generation chamber, an extending section extends to an outside of the pressure generation chamber at one end portion side of the first electrode, and the opening group is provided in at least one side opposite to the extending section of boundaries between the active section and the inactive section. 
     
     
       5. The liquid ejecting head according to  claim 4 , wherein the opening is provided in the extending section side of the boundary between the active section and the inactive section. 
     
     
       6. The liquid ejecting head according to  claim 5 , wherein the opening is provided so as to be symmetrical in the longitudinal direction at the area in which the active section is to be formed. 
     
     
       7. The liquid ejecting head according to  claim 4 , wherein an area, of which a width is narrower than that of a center of the first electrode by the opening of the extending section, has a thickness which is thicker than that of the center side. 
     
     
       8. A liquid ejecting apparatus comprising the liquid ejecting head according to  claim 1 . 
     
     
       9. A liquid ejecting apparatus comprising the liquid ejecting head according to  claim 2 . 
     
     
       10. A liquid ejecting apparatus comprising the liquid ejecting head according to  claim 3 . 
     
     
       11. A liquid ejecting apparatus comprising the liquid ejecting head according to  claim 4 . 
     
     
       12. A liquid ejecting apparatus comprising the liquid ejecting head according to  claim 5 . 
     
     
       13. A liquid ejecting apparatus comprising the liquid ejecting head according to  claim 6 . 
     
     
       14. A liquid ejecting apparatus comprising the liquid ejecting head according to  claim 7 .