US8705582B2ActiveUtilityA1

Distributed feedback laser having enhanced etch stop features

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Assignee: FINISAR CORPPriority: Jun 13, 2007Filed: Jul 1, 2013Granted: Apr 22, 2014
Est. expiryJun 13, 2027(~0.9 yrs left)· nominal 20-yr term from priority
H01S 5/12H01S 5/3406H01S 5/209H01S 5/1231H01S 5/34306B82Y 20/00
55
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Claims

Abstract

In one example embodiment, a DFB laser includes a substrate; an active region positioned above the substrate; a grating layer positioned above the active region, the grating layer including a portion that serves as a primary etch stop layer; a secondary etch stop layer positioned above the grating layer; and a spacer layer interposed between the grating layer and the secondary etch stop layer.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
       1. A distributed feedback (DFB) laser, comprising:
 a substrate; 
 an active region positioned above the substrate; 
 a grating layer positioned above the active region, the grating layer including a portion that serves as a primary etch stop layer; 
 a secondary etch stop layer positioned above the grating layer; and 
 a spacer layer interposed between the grating layer and the secondary etch stop layer. 
 
     
     
       2. The DFB laser as recited in  claim 1 , wherein:
 the secondary etch stop layer comprises indium gallium arsenide phosphide: 
 the spacer layer comprises indium phosphide; and 
 the grating layer comprises indium gallium arsenide phosphide. 
 
     
     
       3. The DFB laser as recited in  claim 1 , wherein a thickness of the spacer layer is at least partly based upon the presence of the secondary etch stop layer. 
     
     
       4. A TOSA comprising:
 a housing; and 
 the DFB laser as recited in  claim 1  positioned within the housing. 
 
     
     
       5. An optical transceiver module comprising:
 the TOSA as recited in  claim 4 ; 
 a ROSA; and 
 a PCB in electrical communication with the TOSA and the ROSA.

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