Vertical guided layered probe

Abstract

The present invention is a set of layered probes that make electrical contact to a device under test. The layered probes are disposed within openings of at least one guide plate. The guide plate surrounds the probes via the openings. The layered probes have a base end, an opposing tip end and a shaft connecting the base end to the tip end. The base end can have a positioning device that extends away from the base end.

What is claimed is: 
     
       1. An apparatus for making electrical contact to a device under test comprising:
 a set of two or more probes, each probe of said set including a base end, an opposing distal tip end, and a shaft connecting said base end to said tip end; 
 said base end of each probe of said set comprising a positioning device disposed on a side of said base end of each probe of said set; 
 each probe of said set comprising a plurality of layers; 
 at least one guide plate comprising openings; and 
 said probes disposed within said openings, said guide plate surrounding said probes via said openings; 
 wherein said tip ends of said set of probes are capable of performing a sideways scrub motion as contact is made to an array of contact pads on the device under test. 
 
     
     
       2. The apparatus of  claim 1  wherein said tip ends of said set of probes are disposed along an arrangement of contact pads. 
     
     
       3. The apparatus of  claim 1  wherein said at least one guide plate comprises at least an upper guide plate within which said base ends of said set of probes are disposed. 
     
     
       4. The apparatus of  claim 1  wherein said at least one guide plate comprises at least one lower guide plate within which said tip ends of said set of probes are disposed. 
     
     
       5. The apparatus of  claim 4  further comprising a second lower guide plate comprising openings within which said tip ends are disposed. 
     
     
       6. The apparatus of  claim 1  wherein said at least one guide plate comprises an upper guide plate and a lower guide plate. 
     
     
       7. The apparatus of  claim 6  further comprising a second lower guide plate comprising openings within which said tip ends are disposed. 
     
     
       8. The apparatus of  claim 1  wherein, for each said probe, said tip end and said base end have a different material composition than said shaft. 
     
     
       9. The apparatus of  claim 8  wherein, for each said probe, said tip end and said base end have material compositions suitable for making temporary electrical contact via mechanical contact. 
     
     
       10. The apparatus of  claim 1  wherein each said probe is replaceable in said apparatus. 
     
     
       11. The apparatus of  claim 1  further comprising:
 a second set of two or more probes, each probe of said second set including a base end, a tip end, and a shaft connecting said base end to said tip end; 
 wherein said at least one guide plate includes openings within which said second set of probes are disposed; and 
 said guide plate surrounding said second set of probes via said openings. 
 
     
     
       12. The apparatus of  claim 11  wherein said tip ends of said first set of probes are spaced by a first pitch and wherein said tip ends of said second set of probes are spaced by a second pitch. 
     
     
       13. The apparatus of  claim 12  wherein said first pitch and said second pitch are substantially equal, and wherein said first and second sets of probes are offset from each other by substantially half said first pitch in a direction X. 
     
     
       14. The apparatus of  claim 11  wherein a center line of said apparatus is parallel to and substantially halfway between said set of two or more probes and said second set of two or more probes. 
     
     
       15. The apparatus of  claim 14  wherein each said tip end of each said probe of said first and second sets of probes further comprises a tip for making electrical contact to the device under test, and wherein each said tip is displaced from a center of its corresponding probe toward said center line, whereby separation between said first and second sets of probes can be increased. 
     
     
       16. The apparatus of  claim 11  wherein each said shaft of each said probe of said first and second sets of probes curves in the same direction. 
     
     
       17. The apparatus of  claim 11  wherein said tip ends of said second set of probes are disposed along an arrangement of contact pads. 
     
     
       18. The apparatus of  claim 1  wherein said set of probes comprises a substantially rectangular cross section. 
     
     
       19. The apparatus of  claim 18  wherein said rectangular cross section of said set of probes comprises a lateral dimension Xp 1  in a direction X parallel to said probe array line and has a second lateral dimension Yp 1  in a direction Y perpendicular to said probe array line, wherein Xp 1 <Yp 1 . 
     
     
       20. The apparatus of  claim 1  wherein said probes are substantially vertical. 
     
     
       21. The apparatus of  claim 20  wherein said set of probes are substantially aligned with a vertical direction Z perpendicular to said probe array line, and wherein each said probe shaft of said first set of probes has a predetermined curvature in an X-Z plane. 
     
     
       22. The apparatus of  claim 1  wherein said plurality of layers comprise metallic layers. 
     
     
       23. The apparatus of  claim 1  further comprising a tip pedestal disposed on said tip end. 
     
     
       24. The apparatus of  claim 1  wherein at least one said guide plate comprises an electrically insulated material. 
     
     
       25. The apparatus of  claim 1  wherein said positioning device comprises one of said plurality of layers. 
     
     
       26. The apparatus of  claim 1  wherein said positioning device extends in a substantially perpendicular direction to each probe of said set. 
     
     
       27. The apparatus of  claim 1  wherein each probe comprises a tip offset from a center of said probe. 
     
     
       28. The apparatus of  claim 1  wherein each probe comprises a tip, said tip and said shaft comprising different materials.