Drawing apparatus, method of manufacturing article, method of manufacturing deflecting apparatus, and method of manufacturing drawing apparatus

Abstract

A drawing apparatus includes a plurality of charged particle optical elements that are sequentially passed through by a plurality of charged particle beams and performs drawing on a substrate with the charged particle beams. The apparatus further includes a deflector array which includes a plurality of deflectors disposed for respective one or more charged particle beams, each of which aligning corresponding one or more charged particle beams between two of the plurality of charged particle optical elements, a plurality of devices configured to respectively apply a plurality of potentials to the deflector array, and a connector configured to connect each of a plurality of electrodes included in the deflector array to one of the plurality of devices and connect electrodes, to which an equal potential is applied, to each other. Number of devices included in the plurality of devices is less than number of electrodes included in the deflector array.

What is claimed is: 
     
       1. A drawing apparatus which includes a plurality of charged particle optical elements that are sequentially passed through by a plurality of charged particle beams, and performs drawing on a substrate with the plurality of charged particle beams, the apparatus comprising:
 a deflector array which includes a plurality of deflectors, including a plurality of electrodes, each of which disposed for corresponding one or more charged particle beams and aligning the corresponding one or more charged particle beams between two of the plurality of charged particle optical elements; 
 a plurality of devices configured to respectively apply a plurality of potentials to the deflector array; and 
 a connector including wirings and configured such that each of the plurality of electrodes and one of the plurality of devices are interconnected via one of the wirings, and electrodes, to which an equal potential is applied, of the plurality of electrodes are connected to a single wiring of the wirings, 
 wherein number of devices included in the plurality of devices is less than number of electrodes included in the plurality of electrodes. 
 
     
     
       2. An apparatus according to  claim 1 , further comprising:
 a detector configured to detect a charged particle beam corresponding to one deflector included in the deflector array; and 
 a controller configured to determine the plurality of potentials based on an output from the detector. 
 
     
     
       3. An apparatus according to  claim 2 , wherein the controller is configured to determine the plurality of potentials by changing two potentials applied respectively to two electrodes of a pair of electrodes included in the plurality of electrodes while maintaining a potential difference between the two electrodes such that a potential of at least one of the two electrodes becomes equal to a potential of at least one of two electrodes of another pair of electrodes included in the plurality of electrodes. 
     
     
       4. An apparatus according to  claim 3 , wherein the controller is configured to change the two potentials such that an amount of change of each of the two potentials is within a predetermined range. 
     
     
       5. An apparatus according to  claim 2 , wherein
 the connector includes a plurality of switching elements for setting a state of connection between the plurality of electrodes and the plurality of devices, and 
 the controller is configured to store the determined plurality of potentials, and to control the plurality of switching elements in accordance with the stored plurality of potentials. 
 
     
     
       6. An apparatus according to  claim 1 , further comprising:
 a vacuum chamber in which the deflector array is disposed and the drawing is performed, the vacuum chamber including a vacuum feedthrough, 
 wherein the plurality of devices are disposed outside the vacuum chamber, the connector is disposed inside the vacuum chamber, and each of the plurality of electrodes is connected to one of the plurality of devices via the vacuum feedthrough. 
 
     
     
       7. A method of manufacturing an article, the method comprising:
 performing drawing on a substrate using a drawing apparatus; 
 developing the substrate on which the drawing has been performed; and 
 processing the developed substrate to manufacture the article, 
 wherein the drawing apparatus includes a plurality of charged particle optical elements that are sequentially passed through by a plurality of charged particle beams and performs drawing on the substrate with the plurality of charged particle beams, the apparatus including: 
 a deflector array which includes a plurality of deflectors, including a plurality of electrodes, each of which disposed for corresponding one or more charged particle beams and aligning the corresponding one or more charged particle beams between two of the plurality of charged particle optical elements; 
 a plurality of devices configured to respectively apply a plurality of potentials to the deflector array; and 
 a connector including wirings and configured such that each of the plurality of electrodes and one of the plurality of devices are interconnected via one of the wirings, and electrodes, to which an equal potential is applied, of the plurality of electrodes are connected to a single wiring of the wirings, 
 wherein number of devices included in the plurality of devices is less than number of electrodes included in the plurality of electrodes. 
 
     
     
       8. A method of manufacturing a deflecting apparatus including a deflector array which includes a plurality of deflectors, including a plurality of electrodes, each of which disposed for corresponding one or more charged particle beams and aligning the corresponding one or more charged particle beams between two of a plurality of charged particle optical elements, a plurality of devices configured to respectively apply a plurality of potentials to the deflector array, and a connector including wirings and configured to perform connection of each of the plurality of electrodes to one of the plurality of devices, the method comprising:
 performing detection of a position of a charged particle beam corresponding to one deflector included in the deflector array; 
 performing determination of a plurality of potentials applied to the plurality of electrodes based on the detection; 
 providing the plurality of devices of which number of devices is same as number of potentials of the determined plurality of potentials; and 
 causing the connector to perform the connection such that each of the plurality of electrodes and one of the plurality of devices are interconnected via one of the wirings, and electrodes, to which an equal potential is applied, of the plurality of electrodes are connected to a single wiring of the wirings. 
 
     
     
       9. A method according to  claim 8 , wherein the determination determines the plurality of potentials by changing two potentials applied respectively to two electrodes of a pair of electrodes included in the plurality of electrodes while maintaining a potential difference between the two electrodes such that a potential of at least one of the two electrodes becomes equal to a potential of at least one of two electrodes of another pair of electrodes included in the plurality of electrodes. 
     
     
       10. A method according to  claim 9 , wherein the determination changes the two potentials such that an amount of change of each of the two potentials is within a predetermined range. 
     
     
       11. A method of manufacturing a drawing apparatus for performing drawing on a substrate with a plurality of charged particle beams, the method comprising:
 assembling a projection system that includes a deflecting apparatus and projects the plurality of charged particle beams onto the substrate, 
 wherein the deflecting apparatus is manufactured using a method defined in  claim 8 .