US8736294B2ActiveUtilityPatentIndex 59

Probe card stiffener with decoupling

Assignee: Chang kevin sPriority: Dec 14, 2010Filed: Dec 14, 2010Granted: May 27, 2014

Est. expiryDec 14, 2030(~4.4 yrs left)· nominal 20-yr term from priority

Inventors:Chang kevin s HOBBS ERIC D

G01R 31/2891G01R 1/07378

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Claims

Abstract

A stiffener for a probe card assembly can include decoupling mechanisms disposed within radial arms of the stiffener. The decoupling mechanisms can be compliant in a direction along a radial direction of said radial arm and rigid in a direction perpendicular to said radial arm. The decoupling mechanisms can decouple the stiffener from thermally induced differential radial contraction and expansion of the stiffener relative to the cardholder to which the stiffener is mounted. This can reduce thermally-induced vertical translation of the probe card assembly.

Claims

exact text as granted — not AI-modified

We claim:

1. A probe card assembly, comprising:
a wiring substrate comprising a first surface, an opposed second surface, and a plurality of internal electrical traces;
a tester interface disposed on said first surface of said wiring substrate and electrically connected to said plurality of internal electrical traces;
a probe head disposed proximate to said second surface of said wiring substrate, said probe head comprising a plurality of probes disposed thereon and arranged to contact an electronic device to be tested, said probe head further comprising a plurality of electrical connections between said plurality of probes and said internal electrical traces;
a stiffener disposed proximate to said first surface, said stiffener comprising a main body coupled to said probe head and said stiffener comprising a plurality of attachment mechanisms disposed distally from said main body; and
a plurality of decoupling mechanisms disposed radially between said main body and said attachment mechanisms, each said decoupling mechanism being sufficiently compliant in a radial direction to move in said radial direction and sufficiently rigid in at least one other direction to resist moving in said at least one other direction,
wherein said stiffener comprises a plurality of radial arms extending radially outward from said main body to a corresponding one of said attachment mechanisms and each said decoupling mechanism is disposed in a corresponding one of said radial arms, and
wherein each said decoupling mechanism allows a first portion of said corresponding radial arm to move away from and toward a second portion of said radial arm.

2. The probe card assembly of claim 1 , wherein said decoupling mechanism accommodates radial changes in dimension of said stiffener relative to a cardholder to which said attachment mechanisms are attached.

3. The probe card assembly of claim 1 , wherein each said decoupling mechanism enables movement of said corresponding radial arm in a direction aligned with a longitudinal axis of said radial arm and resists movement in a direction perpendicular to said longitudinal axis.

4. The probe card assembly claim 1 , wherein said radial arms are removably attached to said main body.

5. The probe card assembly of claim 1 , wherein said decoupling mechanism is configured to provide an amount of compliance such that thermally induced movement of said stiffener offsets sufficiently thermally induced movement of a cardholder to which said probe card assembly is attached that contact ends of said probes stay substantially in a stationary plane over a predetermined temperature range.

6. The probe card assembly of claim 1 , wherein said attachment mechanism comprises a hole sized to receive a bolt for engagement with a cardholder of a prober.

7. The probe card assembly of claim 1 , wherein:
said second portion of said corresponding radial arm extends from said main body to said decoupling mechanism, and
said first portion of said corresponding radial arm extends from said decoupling mechanism to said corresponding attachment mechanism.

8. The probe card assembly of claim 1 , wherein each said decoupling mechanism comprises:
ball bearings disposed between said first portion and said second portion, or
a flexible connector connecting said first portion and said second portion.

9. A stiffener for use with a probe card assembly, said stiffener comprising:
a main body portion;
a plurality of first attachment mechanisms disposed on said main body portion and positioned for attachment to a probe card substrate;
a plurality of radial arms disposed within a plane and extending radially outward from said main body portion and each having a second attachment mechanism disposed proximate to an end of said arm distal from said main body portion for attachment to a cardholder of a prober;
a plurality of decoupling mechanisms each disposed within a corresponding one of said plurality of arms between said main body portion and said second attachment mechanism, wherein each said decoupling mechanism is sufficiently compliant to move in a radial direction along a radial axis of said arm, and each said decoupling mechanism is sufficiently rigid to resist moving in a direction perpendicular to said plane,
wherein each said decoupling mechanism allows a first portion of said corresponding radial arm to move away from and toward a second portion of said radial arm.

10. The stiffener of claim 9 , wherein each said decoupling mechanism comprises:
ball bearings disposed between said first portion and said second portion, or a flexible connector connecting said first portion and said second portion.

11. A probe card assembly, comprising:
a wiring substrate comprising a first surface, an opposed second surface, and a plurality of internal electrical traces;
a tester interface disposed on said first surface of said wiring substrate and electrically connected to said plurality of internal electrical traces;
a probe head disposed proximate to said second surface of said wiring substrate, said probe head comprising a plurality of probes disposed thereon and arranged to contact an electronic device to be tested, said probe head further comprising a plurality of electrical connections between said plurality of probes and said internal electrical traces;
a stiffener disposed proximate to said first surface, said stiffener comprising a main body coupled to said probe head and said stiffener comprising a plurality of attachment mechanisms disposed distally from said main body; and
a plurality of decoupling mechanisms disposed radially between said main body and said attachment mechanisms, each decoupling mechanism being compliant in a radial direction and rigid in at least one other direction, wherein
said stiffener comprises a plurality of radial arms extending radially outward from said main body and one of said decoupling mechanisms is disposed in each of said radial arms, and
said decoupling mechanism comprises a slit disposed within said radial arm.

12. The probe card assembly claim 11 , wherein said decoupling mechanism comprises a plurality of slits disposed within said radial arm.

13. The probe card assembly of claim 12 , wherein each of said plurality of slits is oriented substantially perpendicular to said longitudinal axis of said radial arm.

14. The probe card assembly of claim 12 , wherein each of said plurality of slits is oriented at an angle relative to a surface of said radial arm.

15. The probe card assembly of claim 12 , wherein said plurality of slits define a beam between said plurality of slits, and said beam comprises a hollow portion.

16. The probe card assembly of claim 12 , wherein a first one of said plurality of slits extends inward from a first surface of said plurality of radial arms, and a second one of said plurality of slits extends inward from a second surface of said plurality of radial arms, said second surface opposite and parallel to said first surface.

17. The stiffener of claim 9 , wherein:
said second portion of said corresponding radial arm extends from said main body to said decoupling mechanism, and
said first portion of said corresponding radial arm extends from said decoupling mechanism to said distal end of said corresponding radial arm.

18. The stiffener of claim 9 , wherein said decoupling mechanism accommodates radial changes in dimension of said stiffener relative to a mounting structure to which said second attachment mechanisms are attached.

19. The stiffener of claim 9 , wherein said stiffener comprises any of:
aluminum, steel, stainless steel, low-CTE nickel-steel alloy, and combinations thereof.

20. The stiffener of claim 9 , wherein said first attachment mechanism comprises a threaded hole for receiving a differential screw for adjusting a position of said probe head relative to said stiffener.

21. The stiffener of claim 9 , wherein said second attachment mechanism comprises a through hole for receiving a bolt for engagement into a cardholder of a prober.

22. A stiffener for use with a probe card assembly, said stiffener comprising:
a main body portion;
a plurality of first attachment mechanisms disposed on said main body portion and positioned for attachment to a probe card substrate;
a plurality of radial arms disposed within a plane and extending radially outward from said main body portion and each having a second attachment mechanism disposed proximate to an end of said arm distal from said main body portion for attachment to a cardholder of a prober;
a decoupling mechanism disposed within each of said plurality of arms between said main body portion and said second attachment mechanism, wherein said decoupling mechanism accommodates movement in a radial direction along a radial axis of said arm, and said decoupling mechanism resists movement in a direction perpendicular to said plane,
wherein said decoupling mechanism comprises a slit disposed within said radial arm.

23. The stiffener of claim 22 , wherein said decoupling mechanism comprises a plurality of slits disposed within said radial arm.

24. The stiffener of claim 23 , wherein each of said plurality slits is oriented substantially perpendicular to a longitudinal axis of said radial arm.

25. The stiffener of claim 23 , wherein said plurality of slits define a beam portion between said slits, and said beam portion comprises a hollow portion.

26. The stiffener of claim 23 , wherein said plurality of slits extend from opposing sides of said radial arm into said radial arm.

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