Electrostatic chuck

Abstract

There is provided an electrostatic chuck an electrostatic chuck in which it is hard for the power of suppressing residual adsorption to deteriorate over time. There is provided an electrostatic chuck including an insulating substrate, and an adsorption electrode, wherein a region which includes at least an upper face of the insulating substrate containing Mn is made of ceramics containing a first transition element composed of at least one of Fe and Cr, and a ratio C2/C1 of a content C2 (mol) of the first transition element to a content C1 (mol) of Mn contained in the insulating substrate is 1 or more.

What is claimed is: 
     
       1. An electrostatic chuck, comprising:
 an insulating substrate; and 
 an adsorption electrode, 
 a region which includes at least an upper face of the insulating substrate being made of ceramics containing Mn and a first transition element composed of at least one of Fe and Cr, 
 a ratio C2/C1 of a content C2 (mol) of the first transition element to a content C1 (mol) of Mn contained in the insulating substrate being 1 or more, and 
 the insulating substrate containing Al 2 O 3  as a major constituent. 
 
     
     
       2. The electrostatic chuck according to  claim 1 , wherein the adsorption electrode is disposed inside the insulating substrate,
 an upper face-side region of the insulating substrate contains the first transition element, and the ratio C2/C1 of the content C2 to the content C1 is 1 or more. 
 
     
     
       3. The electrostatic chuck according to  claim 1 , wherein a content ratio of the at least one of Fe and Cr is 80 ppm or more. 
     
     
       4. The electrostatic chuck according to  claim 1 , wherein the ceramics contains Fe in a content ratio of 500 ppm or less.