Thermally assisted magnetic write head, and method of manufacturing the same

Abstract

A thermally assisted magnetic write head includes a waveguide having a first end surface included in an air bearing surface; a magnetic pole having a second end surface included in the air bearing surface; a plasmon generator having a third end surface included in the air bearing surface; a first protective film directly covering a part of the second end surface of the magnetic pole at least; and a second protective film directly covering the first end surface of the waveguide and the third end surface of the plasmon generator. The configuration can reduce recording density and improve thermal stability, furthermore increase the producing yield.

What is claimed is: 
     
       1. A thermally assisted magnetic write head, comprising:
 a waveguide having a first end surface included in an air bearing surface; 
 a magnetic pole having a second end surface included in the air bearing surface; 
 a plasmon generator having a third end surface included in the air bearing surface; 
 a first protective film directly covering a part of the second end surface of the magnetic pole at least; and 
 a second protective film directly covering the first end surface of the waveguide and the third end surface of the plasmon generator. 
 
     
     
       2. The thermally assisted magnetic write head according to  claim 1 , wherein the first protective film is formed of diamond-like carbon. 
     
     
       3. The thermally assisted magnetic write head according to  claim 1 , wherein the first protective film is formed of transparent or translucent material. 
     
     
       4. The thermally assisted magnetic write head according to  claim 1 , wherein the second protective film is formed of tantalum oxide (TaO x ). 
     
     
       5. The thermally assisted magnetic write head according to  claim 1 , wherein a part of the second end surface of the magnetic pole is directly covered by the second protective film. 
     
     
       6. The thermally assisted magnetic write head according to  claim 1 , further comprising a light shield adjacent the magnetic pole thereby protecting other components of the thermally assisted magnetic write head. 
     
     
       7. A head gimbal assembly, comprising:
 a magnetic head slider having a thermally assisted magnetic write head according to  claim 1 ; and 
 a suspension to support the magnetic head slider. 
 
     
     
       8. A head arm assembly, comprising:
 a magnetic head slider having a thermally assisted magnetic write head according to  claim 1 ; 
 a suspension having a first end and a second end, the first end being attached with the magnetic head slider; and 
 an arm supporting the suspension at the second end thereof. 
 
     
     
       9. A magnetic disk unit, comprising a magnetic recording medium and a head arm assembly, wherein the head arm assembly comprises:
 a magnetic head slider having a thermally assisted magnetic write head according to  claim 1 ; 
 a suspension having a first end and a second end, the first end being attached with the magnetic head slider; and 
 an arm supporting the suspension at the second end thereof. 
 
     
     
       10. A method of manufacturing a thermally assisted magnetic write head, comprising steps of:
 (1) forming an air bearing surface through polishing an end surface of a multilayer, the multilayer including a waveguide, a magnetic pole, and a plasmon generator; 
 (2) forming a first protective film to cover the air bearing surface; 
 (3) forming an opening by selectively removing a part, of the first protective film, that covers the waveguide and the plasmon generator; and 
 (4) forming a second protective film to fill the opening so as to directly cover end surfaces, included in the air bearing surface, of the waveguide and the plasmon generator. 
 
     
     
       11. The method according to  claim 10 , wherein the step (3) comprises:
 forming a photoresist film to cover the first protective film; 
 irradiating a light or laser to a back surface of the waveguide opposite the end surface, to form an exposed area corresponding to the end surfaces of the waveguide and the plasmon generator; and 
 forming the opening by etching the exposed area. 
 
     
     
       12. The method according to  claim 11 , wherein the light or laser has a wavelength that is lower than 500 nm. 
     
     
       13. The method according to  claim 10 , wherein the step (4) comprises:
 forming the second protective film to cover the photoresist film and fill the opening; and 
 removing the photoresist film. 
 
     
     
       14. The method according to  claim 10 , further comprising forming a light shield adjacent the magnetic pole thereby protecting other components of the thermally assisted magnetic write head. 
     
     
       15. The method according to  claim 10 , wherein the step (3) is performed on a row bar or multiple row bars with a plurality of thermally assisted magnetic write heads. 
     
     
       16. The method according to  claim 15 , further comprising putting the row bars on a quartz substrate, and irradiating a light or laser to a side of the quartz substrate.