Tool for harvesting polycrystalline silicon-coated rods from a chemical vapor deposition reactor

Abstract

A tool for harvesting polycrystalline silicon-coated rods from a chemical vapor deposition reactor includes a body including outer walls sized for enclosing the rods within the outer walls. Each outer wall includes a door for allowing access to at least one of the rods.

What is claimed is: 
     
       1. A tool for harvesting polycrystalline silicon-coated rods from a chemical vapor deposition reactor comprising:
 a body comprising three sections, each including inner walls and outer walls sized for enclosing the rods in an internal space within the inner and outer walls, where two of the sections open via a revolving platform underlying the body, 
 each inner and outer wall including a door for allowing access to at least one of the rods. 
 
     
     
       2. A tool as set forth in  claim 1  including at least 6 outer walls, and wherein each wall includes at least two movable doors. 
     
     
       3. A tool as set forth in  claim 1  including at least 10 outer walls, and wherein each wall includes at least three movable doors. 
     
     
       4. A tool as set forth in  claim 1  wherein each door is provided with vents to expedite rapid cooling of the rods. 
     
     
       5. A tool as set forth in  claim 1  wherein each of the three sections are sized and shaped to hold eighteen rods. 
     
     
       6. A tool as set forth in  claim 1  wherein the revolving platform rotates the tool to expedite processing. 
     
     
       7. A tool as set forth in  claim 6  further comprising alignment shafts on the revolving platform for facilitating alignment of the tool and inhibiting inadvertent contact with the rods. 
     
     
       8. A tool as set forth in  claim 1  wherein the tool has an open configuration and a closed configuration. 
     
     
       9. A tool as set forth in  claim 1  further comprising openings in the tool, and forks sized and shaped to be received in the openings and to support at least one of the rods. 
     
     
       10. A tool as set forth in  claim 9  wherein each fork is configured to support at least four rods. 
     
     
       11. A tool as set forth in  claim 1  wherein inner surfaces of the body are lined with a polymeric material to inhibit contamination. 
     
     
       12. A tool for harvesting polycrystalline silicon-coated rods from a chemical vapor deposition reactor comprising:
 outer walls defining a space for receiving the rods organized in at least one circle; and 
 a revolving platform below the space that facilitates opening the space so that at least two of the rods move horizontally apart from each other and relative to an underlying surface. 
 
     
     
       13. A tool as set forth in  claim 12  further comprising a door on each inner and outer wall for allowing access to at least one of the rods. 
     
     
       14. A tool as set forth in  claim 13  wherein each door is provided with vents to expedite rapid cooling of the rods. 
     
     
       15. A tool as set forth in  claim 12  wherein the revolving platform facilitates closing the space. 
     
     
       16. A tool as set forth in  claim 12  further comprising alignment shafts on the revolving platform which facilitate alignment of the tool and inhibit inadvertent contact with the rods. 
     
     
       17. A tool as set forth in  claim 12  wherein the space includes at least three sections. 
     
     
       18. A tool as set forth in  claim 12  further comprising openings in the tool, and forks sized and shaped to be received in the openings and to support at least one of the rods. 
     
     
       19. A tool as set forth in  claim 9  wherein each fork is configured to support at least four rods. 
     
     
       20. A tool as set forth in  claim 12  wherein inner surfaces of the walls are lined with a polymeric material to inhibit contamination.