Liquid ejection head and method of manufacturing liquid ejection head

Abstract

A liquid ejection head includes a plurality of ejection orifices which eject a liquid, a plurality of pressure chambers which store the liquid ejected from the ejection orifices and eject the liquid from the ejection orifices in accordance with expansion and contraction of an inner wall of the pressure chambers, and a plurality of recess portions which are formed around the pressure chambers, wherein a piezoelectric member is present between at least one of the recess portions and the pressure chambers.

The invention claimed is: 
     
       1. A liquid ejection head comprising:
 an ejection orifice for ejecting a liquid; 
 a pressure chamber for storing the liquid to be ejected from the ejection orifice, the pressure chamber having a first electrode on an inner side surface thereof; 
 a piezoelectric material which constitutes a side wall of the pressure chamber and generates energy utilized for ejecting the liquid; and 
 a plurality of openings which have a second electrode on an inner side surface thereof and are provided on both sides of the pressure chamber in each of a first direction and a second direction intersecting the first direction concerning a cross-section of the liquid ejection head passing through the pressure chamber in a direction intersecting a supply direction of the liquid which flows within the pressure chamber, 
 wherein in the cross-section of the liquid ejection head, concerning the pressure chamber and the openings provided on both sides thereof in the first direction, the length of at least one of the openings in the second direction is longer than the length of the pressure chamber in the second direction. 
 
     
     
       2. The liquid ejection head according to  claim 1 , wherein a first substrate, in which a first groove forming part of the side wall of the pressure chamber and a second groove forming part of at least one of the openings are alternately formed in parallel, and a second substrate, in which a third groove forming part of at least one of the openings is formed in parallel, are laminated. 
     
     
       3. The liquid ejection head according to  claim 2 , wherein at least one of the first substrate and the second substrate is a piezoelectric material. 
     
     
       4. The liquid ejection head according to  claim 1 , wherein the side wall constituting the pressure chamber is polarized in a direction of connecting the first electrode provided on the inner side surface of the pressure chamber and the second electrode provided on the inner side surface of at least one of the openings. 
     
     
       5. The liquid ejection head according to  claim 1 , further comprising on one end side of the pressure chamber a nozzle plate in which the ejection orifice is formed. 
     
     
       6. The liquid ejection head according to  claim 1 , wherein a plurality of the ejection orifices are arranged along the first direction, and a plurality of the ejection orifices are arranged obliquely with respect to a direction perpendicular to the first direction. 
     
     
       7. The liquid ejection head according to  claim 1 , wherein the plurality of openings are supplied with a liquid for cooling the liquid ejection head. 
     
     
       8. The liquid ejection head according to  claim 1 , wherein in the cross-section of the liquid ejection head the pressure chamber has a rectangular cross-sectional shape. 
     
     
       9. The liquid ejection head according to  claim 1 , wherein in the cross-section of the liquid ejection head at least one of the openings has a rectangular cross-sectional shape. 
     
     
       10. The liquid ejection head according to  claim 1 , wherein in the cross-section of the liquid ejection head, concerning the pressure chamber and the openings provided on both sides thereof in the second direction, the length of at least one of the openings in the first direction is longer than the length of the pressure chamber in the first direction. 
     
     
       11. The liquid ejection head according to  claim 1 , wherein in the cross-section of the liquid ejection head, concerning the pressure chamber and the openings provided on both sides thereof in the first direction, the length of at least one of the openings in the first direction is shorter than the length of the pressure chamber in the first direction. 
     
     
       12. The liquid ejection head according to  claim 1 , wherein in the cross-section of the liquid ejection head, concerning the pressure chamber and the openings provided on both sides thereof in the second direction, the length of at least one of the openings in the second direction is shorter than the length of the pressure chamber in the second direction. 
     
     
       13. A liquid ejection head comprising:
 an ejection orifice for ejecting a liquid; 
 a pressure chamber for storing the liquid to be ejected from the ejection orifice, the pressure chamber having a first electrode on an inner side surface thereof; 
 a piezoelectric material which constitutes a side wall of the pressure chamber and generates energy utilized for ejecting the liquid; and 
 a plurality of openings which have a second electrode on an inner side surface thereof and are provided on both sides of the pressure chamber in each of a first direction and a second direction intersecting the first direction concerning a cross-section of the liquid ejection head passing through the pressure chamber in a direction intersecting a supply direction of the liquid which flows within the pressure chamber, 
 wherein in the cross-section of the liquid ejection head, concerning the pressure chamber and the openings provided on both sides thereof in the second direction, the length of at least one of the openings in the first direction is longer than the length of the pressure chamber in the first direction. 
 
     
     
       14. The liquid ejection head according to  claim 13 , wherein a first substrate, in which a first groove forming part of the side wall of the pressure chamber and a second groove forming part of at least one of the openings are alternately formed in parallel, and a second substrate, in which a third groove forming part of at least one of the openings is formed in parallel, are laminated. 
     
     
       15. The liquid ejection head according to  claim 14 , wherein at least one of the first substrate and the second substrate is a piezoelectric material. 
     
     
       16. A liquid ejection head comprising:
 an ejection orifice for ejecting a liquid; 
 a pressure chamber for storing the liquid to be ejected from the ejection orifice, the pressure chamber having a first electrode on an inner side surface thereof; 
 a piezoelectric material which constitutes a side wall of the pressure chamber and generates energy utilized for ejecting the liquid; and 
 a plurality of openings which have a second electrode on an inner side surface thereof and are provided on both sides of the pressure chamber in each of a first direction and a second direction intersecting the first direction concerning a cross-section of the liquid ejection head passing through the pressure chamber in a direction intersecting a supply direction of the liquid which flows within the pressure chamber, 
 wherein in the cross-section of the liquid ejection head, concerning the pressure chamber and the openings provided on both sides thereof in the first direction, the length of at least one of the openings in the first direction is shorter than the length of the pressure chamber in the first direction. 
 
     
     
       17. The liquid ejection head according to  claim 16 , wherein a first substrate, in which a first groove forming part of the side wall of the pressure chamber and a second groove forming part of at least one of the openings are alternately formed in parallel, and a second substrate, in which a third groove forming part of at least one of the openings is formed in parallel, are laminated. 
     
     
       18. The liquid ejection head according to  claim 17 , wherein at least one of the first substrate and the second substrate is a piezoelectric material. 
     
     
       19. A liquid ejection head comprising:
 an ejection orifice for ejecting a liquid; 
 a pressure chamber for storing the liquid to be ejected from the ejection orifice, the pressure chamber having a first electrode on an inner side surface thereof; 
 a piezoelectric material which constitutes a side wall of the pressure chamber and generates energy utilized for ejecting the liquid; and 
 a plurality of openings which have a second electrode on an inner side surface thereof and are provided on both sides of the pressure chamber in each of a first direction and a second direction intersecting the first direction concerning a cross-section of the liquid ejection head passing through the pressure chamber in a direction intersecting a supply direction of the liquid which flows within the pressure chamber, 
 wherein in the cross-section of the liquid ejection head, concerning the pressure chamber and the openings provided on both sides thereof in the second direction, the length of at least one of the openings in the second direction is shorter than the length of the pressure chamber in the second direction. 
 
     
     
       20. The liquid ejection head according to  claim 18 , wherein a first substrate, in which a first groove forming part of the side wall of the pressure chamber and a second groove forming part of at least one of the openings are alternately formed in parallel, and a second substrate, in which a third groove forming part of at least one of the openings is formed in parallel, are laminated.