Treatment liquid for inhibiting pattern collapse in microstructures, and microstructure manufacturing method using said treatment liquid

Abstract

There are provided a processing liquid for suppressing pattern collapse of a microstructure which includes at least one compound selected from the group consisting of an imidazolium halide containing an alkyl group having 12, 14 or 16 carbon atoms, a pyridinium halide containing an alkyl group having 14 or 16 carbon atoms and an ammonium halide containing an alkyl group having 16 or 18 carbon atoms, and water; and a method for producing a microstructure formed of silicon oxide using the processing liquid.

The invention claimed is: 
     
       1. A processing liquid for suppressing pattern collapse of a microstructure formed of silicon oxide, consisting essentially of water and at least one compound selected from the group consisting of an imidazolium halide comprising an alkyl group having 12, 14 or 16 carbon atoms, a pyridinium halide halide comprising an alkyl group having 14 or 16 carbon atoms and an ammonium halide halide comprising an alkyl group having 16 or 18 carbon atoms. 
     
     
       2. A processing liquid for suppressing pattern collapse of a microstructure formed of silicon oxide, comprising water and at least one compound selected from the group consisting of an imidazolium halide comprising an alkyl group having 12, 14 or 16 carbon atoms, a pyridinium halide halide comprising an alkyl group having 14 or 16 carbon atoms and an ammonium halide halide comprising an alkyl group having 16 or 18 carbon atoms,
 wherein the alkyl group having 12 carbon atoms is a dodecyl group, the alkyl group having 14 carbon atoms is a tetradecyl group, the alkyl group having 16 carbon atoms is a hexadecyl group, and the alkyl group having 18 carbon atoms is an octadecyl group. 
 
     
     
       3. The processing liquid according to  claim 2 , wherein the processing liquid comprises said imidazolium halide and the imidazolium halide is at least one compound selected from the group consisting of 1-dodecyl-3-methyl imidazolium chloride, 1-tetradecyl-3-methyl imidazolium chloride and 1-hexadecyl-3-methyl imidazolium chloride. 
     
     
       4. The processing liquid according to  claim 2 , wherein the processing liquid comprises said pyridinium halide and the pyridinium halide is at least one compound selected from the group consisting of tetradecyl pyridinium chloride, hexadecyl pyridinium chloride, 1-tetradecyl-4-methyl pyridinium chloride and 1-hexadecyl-4-methyl pyridinium chloride. 
     
     
       5. The processing liquid according to  claim 2 , wherein the processing liquid comprises said ammonium halide and the ammonium halide is at least one compound selected from the group consisting of hexadecyl trimethyl ammonium chloride, octadecyl trimethyl ammonium chloride, benzyl dimethyl hexadecyl ammonium chloride and benzyl dimethyl octadecyl ammonium chloride. 
     
     
       6. The processing liquid according to  claim 1 , wherein a content of the at least one compound selected from the group consisting of the imidazolium halide, the pyridinium halide and the ammonium halide in the processing liquid is from 10 ppm to 10%. 
     
     
       7. A method for producing a microstructure formed of silicon oxide, comprising:
 subjecting a structure to wet etching or dry etching to obtain the microstructure; and 
 rinsing the microstructure obtained by the wet etching or dry etching with a processing liquid for suppressing pattern collapse of the microstructure, the processing liquid comprising water and at least one compound selected from the group consisting of an imidazolium halide comprising an alkyl group having 12, 14 or 16 carbon atoms, a pyridinium halide comprising an alkyl group having 14 or 16 carbon atoms and an ammonium halide comprising an alkyl group having 16 or 18 carbon atoms. 
 
     
     
       8. The method according to  claim 7 , wherein the microstructure formed of silicon oxide is a semiconductor device or a micromachine. 
     
     
       9. The method according to  claim 7 , wherein the processing liquid consists essentially of said water and said at least one compound selected from the group consisting of an imidazolium halide comprising an alkyl group having 12, 14 or 16 carbon atoms, a pyridinium halide comprising an alkyl group having 14 or 16 carbon atoms and an ammonium halide comprising an alkyl group having 16 or 18 carbon atoms. 
     
     
       10. The method according to  claim 7 , wherein the alkyl group having 12 carbon atoms is a dodecyl group, the alkyl group having 14 carbon atoms is a tetradecyl group, the alkyl group having 16 carbon atoms is a hexadecyl group, and the alkyl group having 18 carbon atoms is an octadecyl group. 
     
     
       11. The method according to  claim 7 , wherein the processing liquid comprises said imidazolium halide and the imidazolium halide is at least one compound selected from the group consisting of 1-dodecyl-3-methyl imidazolium chloride, 1-tetradecyl-3-methyl imidazolium chloride and 1-hexadecyl-3-methyl imidazolium chloride. 
     
     
       12. The method according to  claim 7 , wherein the processing liquid comprises said pyridinium halide and the pyridinium halide is at least one compound selected from the group consisting of tetradecyl pyridinium chloride, hexadecyl pyridinium chloride, 1-tetradecyl-4-methyl pyridinium chloride and 1-hexadecyl-4-methyl pyridinium chloride. 
     
     
       13. The method according to  claim 7 , wherein the processing liquid comprises said ammonium halide and the ammonium halide is at least one compound selected from the group consisting of hexadecyl trimethyl ammonium chloride, octadecyl trimethyl ammonium chloride, benzyl dimethyl hexadecyl ammonium chloride and benzyl dimethyl octadecyl ammonium chloride. 
     
     
       14. The processing liquid according to  claim 1 , wherein the alkyl group having 12 carbon atoms is a dodecyl group, the alkyl group having 14 carbon atoms is a tetradecyl group, the alkyl group having 16 carbon atoms is a hexadecyl group, and the alkyl group having 18 carbon atoms is an octadecyl group. 
     
     
       15. The processing liquid according to  claim 1 , wherein the processing liquid comprises said imidazolium halide and the imidazolium halide is at least one compound selected from the group consisting of 1-dodecyl-3-methyl imidazolium chloride, 1-tetradecyl-3-methyl imidazolium chloride and 1-hexadecyl-3-methyl imidazolium chloride. 
     
     
       16. The processing liquid according to  claim 1 , wherein the processing liquid comprises said pyridinium halide and the pyridinium halide is at least one compound selected from the group consisting of tetradecyl pyridinium chloride, hexadecyl pyridinium chloride, 1-tetradecyl-4-methyl pyridinium chloride and 1-hexadecyl-4-methyl pyridinium chloride. 
     
     
       17. The processing liquid according to  claim 1 , wherein the processing liquid comprises said ammonium halide and the ammonium halide is at least one compound selected from the group consisting of hexadecyl trimethyl ammonium chloride, octadecyl trimethyl ammonium chloride, benzyl dimethyl hexadecyl ammonium chloride and benzyl dimethyl octadecyl ammonium chloride.