Trihalosilane refining method

Abstract

A trihalosilane refining device and a trihalosilane refining method are provided. The trihalosilane refining device can be useful in obtaining high-purity trihalosilane from a feed containing a trihalosilane while consuming a small amount of energy.

What is claimed is: 
     
       1. A trihalosilane refining method, comprising:
 introducing a feed containing a trihalosilane through an inlet port of a divided wall distillation column, which has an upper column region, a preliminary separation region, a main separation region and a lower column region formed therein and comprises the inlet port installed to introduce the feed containing the trihalosilane into the preliminary separation region, a first outlet port, a second outlet port and a third outlet port; and 
 introducing an effluent, which flows out through the second outlet port formed at the 1/9 to 8/9 section of the divided wall section of the main separation region, into a first distillation column, 
 wherein the second outlet port or the effluent flowing out through the second outlet port is maintained at a temperature of 86.4° C. to 116.4° C., and 
 wherein the first distillation column is maintained at an operating pressure of −0.6 Kg/sqcmG to 9.0 Kg/sqcmG and an operating temperature of 37° C. to 145° C. 
 
     
     
       2. The trihalosilane refining method of  claim 1 , wherein the feed is introduced through the inlet port installed at a 1/10 to 9/10 section of the preliminary separation region. 
     
     
       3. The trihalosilane refining method of  claim 1 , wherein the third outlet port is installed at the divided wall distillation column to enable outflow of a component in the lower column region, and the trihalosilane refining method further comprises introducing the component flowing out through the third outlet port into a second distillation column. 
     
     
       4. The trihalosilane refining method of  claim 3 , wherein the third outlet port or the effluent flowing out through the third outlet port is maintained at a temperature of 129.9° C. to 159.9° C. under a pressure of 5.8 Kg/sqcmG. 
     
     
       5. The trihalosilane refining method of  claim 3 , wherein the second distillation column is maintained at an operating pressure of 0.1 Kg/sqcmG to 52.5 Kg/sqcmG and an operating temperature of 37° C. to 223.5° C. 
     
     
       6. The trihalosilane refining method of  claim 1 , further comprising:
 introducing the effluent flowing out from a lower portion of the first distillation column into the third distillation column. 
 
     
     
       7. The trihalosilane refining method of  claim 6 , wherein the third distillation column is maintained at an operating pressure of 0.1 Kg/sqcmG to 50.5 Kg/sqcmG and an operating temperature of 37° C. to 219.5° C.