Device for generating heavy-ion beam and method thereof

Abstract

There is provided a device for generating a heavy-ion beam. The device includes a laser beam generating unit configured to generate a laser beam; a target configured to generate a heavy-ion beam by the laser beam; a laser optical system configured to focus the laser beam on the front of the target; and a plasma treating unit disposed at a rear surface of the target and configured to remove impurities within the target by plasma surface treatment that is performed by radiating cationic plasma onto the rear surface of the target.

What is claimed is: 
     
       1. A device for generating a heavy-ion beam, comprising:
 a laser beam generating unit configured to generate a laser beam; 
 a target configured to generate a heavy-ion beam by the laser beam; 
 a laser optical system configured to focus the laser beam on the front of the target; and 
 a plasma treating unit disposed at a rear surface of the target and configured to remove impurities within the target by plasma surface treatment that is performed by radiating cationic plasma onto the rear surface of the target. 
 
     
     
       2. The device according to  claim 1 ,
 wherein the impurities are a proton material. 
 
     
     
       3. The device according to  claim 1 ,
 wherein the target is positioned in a vacuum chamber, 
 the plasma surface treatment is performed in the vacuum chamber, and 
 the laser optical system is connected to or disconnected from the vacuum chamber through a valve. 
 
     
     
       4. The device according to  claim 1 ,
 wherein the plasma treating unit includes a plasma generating unit configured to generate plasma and a plasma delivering unit configured to deliver a cationic plasma beam onto the target by accelerating cations among the generated plasma. 
 
     
     
       5. The device according to  claim 4 ,
 wherein the plasma delivering unit includes at least one control electrode and a power supply device, and the control electrode is charged with a negative voltage. 
 
     
     
       6. The device according to  claim 4 ,
 wherein the control electrode is formed as a grid. 
 
     
     
       7. The device according to  claim 5 ,
 wherein the control electrode is formed to adjust a distance from the rear surface of the target. 
 
     
     
       8. The device according to  claim 3 , further comprising
 a heavy-ion beam output unit connected to an external side of the vacuum chamber through an on-off valve, 
 wherein the heavy-ion beam output unit is aligned with the laser beam and installed at the rear surface of the target. 
 
     
     
       9. A method of generating a heavy-ion beam in which impurities including a proton material within a target are removed by a device for generating heavy-ions that includes a vacuum chamber having the target positioned therein, a laser optical system disposed outside of the vacuum chamber and configured to focus a laser beam on the front of the target, a plasma treating unit disposed at a rear surface of the target and configured to perform plasma surface treatment of the target, and a heavy-ion beam output unit configured to output the heavy-ion beam generated from the target, the method comprising:
 disposing the rear surface of the target at a position facing a plasma generating unit of the plasma treating unit; 
 disconnecting the laser optical system and the heavy-ion beam output unit from a region of the vacuum chamber in which plasma treatment is performed; 
 generating plasma in the plasma generating unit; and 
 radiating cations such that a negative voltage is applied to control electrodes that are disposed at the rear surface of the target at predetermined intervals and a cationic plasma beam in the generated plasma is radiated onto the rear surface of the target. 
 
     
     
       10. The method according to  claim 9 ,
 wherein, after the radiating of cations, the method includes: 
 disconnecting the plasma generating unit and removing residual water molecules or impurities in the vacuum chamber; 
 forming a vacuum state such that the disconnected laser optical system and heavy-ion beam output unit are connected to the vacuum chamber to maintain the same predetermined degree of vacuity as the vacuum chamber; 
 disposing the rear surface of the target to face the heavy-ion beam output unit after the forming of the vacuum state; 
 generating a laser beam and focusing the laser beam, which is delivered by the laser optical system, on the target; and 
 outputting a heavy-ion beam generated from the rear surface of the target by the laser beam to the heavy-ion beam output unit. 
 
     
     
       11. The method according to  claim 10 ,
 wherein the outputting further includes 
 performing detection by measuring at least one of energy, an amount, and a distribution of the output heavy-ion beam.