US9224666B2ActiveUtilityPatentIndex 62
Circuit arrangement for a thermally conductive chip assembly and a manufacturing method
Est. expiryApr 18, 2032(~5.8 yrs left)· nominal 20-yr term from priority
Inventors:ZIEGLER ROBERT
H10W 90/754H10W 90/734H10W 72/07337H10W 72/01361H10W 72/01336H10W 72/953H10W 72/952H10W 72/884H10W 72/354H10W 72/352H10W 72/325H10W 72/075H10W 72/073H10W 70/635H10W 40/259H10W 40/22H10W 40/00H10W 40/228H10W 70/692H01L 2224/48091H01L 2224/73265H01L 23/34H01L 2924/15787H01L 2224/92247H01L 2224/48227H01L 2224/83444H01L 2924/07802H01L 2924/01078H01L 23/49827H01L 2224/2929H01L 23/3731H01L 2224/29339H01L 24/83H01L 2224/8385H01L 2224/83439H01L 23/367H01L 2224/83192H01L 2224/27442H01L 24/29H01L 24/32H01L 2224/32225H01L 23/3677H01L 23/15H01L 2224/48237H01L 24/48H01L 2924/01046H01L 2924/0665H01L 24/27H01L 2224/83488H01L 2924/00014H01L 2224/27505H01L 2924/00H01L 2224/45099
62
PatentIndex Score
3
Cited by
16
References
15
Claims
Abstract
The circuit arrangement according to the invention provides a substrate ( 10 ), a connecting element ( 18 ) and a chip ( 16 ). The substrate ( 10 ) provides at least a partial metallisation ( 11 ) on its surface. The connecting element ( 18 ) is applied to the metallisation ( 11 ). The chip ( 16 ) is applied to the connecting element ( 18 ). The connecting element ( 18 ) provides an electrically non-conductive glass layer ( 14 ), which is applied directly to the metallisation ( 11 ), and an adhesive layer ( 15 ) between the chip ( 16 ) and the glass layer ( 14 ).
Claims
exact text as granted — not AI-modifiedThe invention claimed is:
1. A circuit arrangement comprising:
a substrate, a connecting element and a chip,
wherein the substrate provides on its surface at least a partial metallization,
wherein the connecting element is applied to the metallization,
wherein the chip is applied to the connecting element,
wherein the connecting element provides an electrically non-conductive glass layer which is applied to the metallization,
wherein the glass layer extends completely between the chip and the substrate;
wherein an adhesive layer is applied between the chip and the glass layer,
wherein the metallization extends between the glass layer and the substrate so that the glass layer can be applied to the metallization,
wherein a through connection connects the metallization on an upper side of the substrate to a lower side of the substrate in an area of the connecting element,
wherein the glass layer is substantially adapted to a surface of the metallization, and a thickness of the glass layer is configured to electrically insulate the chip from the metallization while minimizing a thermal resistance between the chip and the metallization,
wherein the metallization is applied to the substrate by a thick-layer process,
wherein the metallization provides a maximum surface roughness in a range of 1 μm to 5 μm, and
wherein the glass layer provides a maximum average thickness in a range of 5 μm to 12 μm.
2. The circuit arrangement according to claim 1 , wherein the adhesive layer provides a greater specific thermal conductivity than the glass layer by at least a factor of 5.
3. The circuit arrangement according to claim 1 , wherein specific thermal resistances and thicknesses of the adhesive layer and of the glass layer are such that the thermal resistance of the adhesive layer is less than the thermal resistance of the glass layer by at least a factor of 2.
4. A circuit arrangement, comprising:
a substrate, a connecting element and a chip,
wherein the substrate provides on its surface at least a partial metallization,
wherein the connecting element is applied to the metallization,
wherein the chip is applied to the connecting element,
wherein the connecting element provides an electrically non-conductive glass layer which is applied to the metallization,
wherein the glass layer extends completely between the chip and the substrate;
wherein an adhesive layer is applied between the chip and the glass layer,
wherein the metallization extends between the glass layer and the substrate so that the glass layer can be applied to the metallization,
wherein a through connection connects the metallization on an upper side of the substrate to a lower side of the substrate in an area of the connecting element,
wherein the glass layer is substantially adapted to a surface of the metallization, and a thickness of the glass layer is configured to electrically insulate the chip from the metallization while minimizing a thermal resistance between the chip and the metallization,
wherein the metallization is applied to the substrate by a thin-layer process, and
wherein the metallization provides a maximum surface roughness in a range of 0.25 μm to 1 μm.
5. The circuit arrangement according to claim 1 , wherein the glass layer is applied by sintering a glass paste onto the substrate.
6. The circuit arrangement according to claim 1 , wherein the adhesive layer has a binding agent, the binding agent having an epoxy resin with incorporated metal particles, and
wherein the adhesive layer is electrically conductive.
7. The circuit arrangement according to claim 1 , wherein the metallization comprises gold or a silver-palladium alloy or a silver-platinum alloy or copper.
8. A method for manufacturing a circuit arrangement with a substrate, a connecting element and a chip, comprising:
providing at least a partial metallization on the substrate;
providing a glass layer on the metallization, wherein the glass layer extends completely between the chip and the substrate,
applying an adhesive layer to the glass layer,
applying the chip to the adhesive layer,
wherein the metallization extends between the glass layer and the substrate so that the glass layer can be applied to the metallization,
wherein a through connection connects the metallization on an upper side of the substrate to a lower side of the substrate in an area of the connecting element,
wherein the glass layer is substantially adapted to a surface of the metallization, and a thickness of the glass layer is configured to electrically insulate the chip from the metallization while minimizing a thermal resistance between the chip and the metallization,
wherein the metallization is applied to the substrate by a thick-layer process,
wherein the thick-layer process achieves a maximum surface roughness of the metallization in a range of 1 μm to 5 μm, and
wherein the glass layer is applied in such a manner that is provides a maximum average thickness in a range of 5 μm to 12 μm.
9. The method according to claim 8 , wherein the adhesive layer is applied in such a manner that it provides a greater specific thermal conductivity than the glass layer by at least a factor of 5.
10. The method according to claim 8 , wherein the specific thermal resistances and thicknesses of the adhesive layer and of the glass layer are selected in such a manner that the thermal resistance of the adhesive layer is less than the thermal resistance of the glass layer by at least a factor 2.
11. A method for manufacturing a circuit arrangement with a substrate, a connecting element and a chip, comprising:
providing at least a partial metallization on the substrate,
providing a glass layer on the metallization, wherein the glass layer extends completely between the chip and the substrate,
applying an adhesive layer to the glass layer,
applying the chip to the adhesive layer,
wherein the metallization extends between the glass layer and the substrate so that the glass layer can be applied to the metallization,
wherein a through connection connects the metallization on an upper side of the substrate to a lower side of the substrate in an area of the connecting element,
wherein the glass layer is substantially adapted to a surface of the metallization, and a thickness of the glass layer is configured to electrically insulate the chip from the metallization while minimizing a thermal resistance between the chip and the metallization,
wherein the metallization is applied to the substrate by a thin-layer process, and
wherein the thin-layer process achieves a maximum surface roughness of the metallization in a range of 0.25 μm to 1 μm.
12. The method according to claim 8 , wherein the glass layer is applied to the substrate by sintering a glass paste.
13. The method according to claim 8 , wherein the adhesive layer is manufactured from a binding agent, the binding agent including an epoxy resin with incorporated metal particles, so that the adhesive layer is electrically conductive.
14. The method according to claim 8 , wherein the metallization is manufactured from gold or a silver-palladium alloy or a silver-platinum alloy or copper.
15. The method according to claim 13 , wherein the metal particles comprise silver particles.Cited by (0)
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