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US9224987B2ActiveUtilityPatentIndex 37

Device for manufacturing organic light-emitting display panel and method of manufacturing organic light-emitting display panel using the same

Assignee: SONG HA-JINPriority: Jul 18, 2011Filed: Apr 26, 2012Granted: Dec 29, 2015
Est. expiryJul 18, 2031(~5 yrs left)· nominal 20-yr term from priority
Inventors:SONG HA JINLEE SEUNG-MOOK
C23C 14/562H10K 71/40H10K 71/00C23C 14/048H01L 51/0009H01L 51/56H01L 51/0013H10K 71/18H10K 71/162
37
PatentIndex Score
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Cited by
14
References
12
Claims

Abstract

A device for manufacturing an organic light-emitting display panel and a method of manufacturing an organic light-emitting display panel by using the same. A device for manufacturing an organic light-emitting display panel includes a plurality of chambers; a deposition unit configured to form a transfer layer on a film supplied into the plurality of chambers in a roll-to-roll process; and a laser thermal transfer device configured to transfer a pattern of the transfer layer formed on the film onto a substrate that is supplied into a chamber of the plurality of chambers.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
       1. A method of manufacturing an organic light-emitting display panel, the method comprising:
 continuously supplying a film into a plurality of chambers in a roll-to-roll process; 
 forming a transfer layer on a surface of the film using a deposition unit; 
 transferring a substrate into a chamber of the plurality of chambers from a substrate transfer chamber; and 
 transferring a pattern of the transfer layer formed on the film onto the substrate using a laser thermal transfer device that is spaced apart from the film, 
 wherein a pattern mask is disposed between the laser thermal transfer device and the film, 
 wherein a laser beam emitted from the laser thermal transfer device is transmitted through an opening formed in the pattern mask and irradiated on the film on which the transfer layer is deposited, 
 wherein forming the transfer layer on the surface of the film using the deposition unit and transferring the pattern of the transfer layer onto the substrate using the laser thermal transfer device are performed in a same chamber of the plurality of chambers, 
 wherein the substrate transfer chamber is maintained substantially in the same atmosphere in which the same chamber of the plurality of chambers is maintained. 
 
     
     
       2. The method of  claim 1 , wherein the film supplied in a roll-to-roll process comprises a base film and a light-to-heat conversion layer formed on the base film, and wherein forming the transfer layer on the surface of the film comprises depositing the transfer layer on the light-to-heat conversion layer using the deposition unit. 
     
     
       3. The method of  claim 2 , wherein the film is supplied in a horizontal direction, and the deposition unit is positioned below the film and sprays a transfer layer-forming raw material from below the film toward an upper portion of the film. 
     
     
       4. The method of  claim 2 , wherein the film is supplied in a vertical direction, and the deposition unit is spaced apart from the film, arranged parallel to the film, and sprays a transfer layer-forming raw material in a horizontal direction. 
     
     
       5. The method of  claim 1 , wherein chambers of the plurality of chambers are maintained in multi-stage vacuum states, and the transfer layer is formed and the pattern of the film is transferred in a high vacuum chamber of the plurality of chambers. 
     
     
       6. The method of  claim 5 , wherein the high vacuum chamber is connected to the substrate transfer chamber, and the substrate is transferred from the substrate transfer chamber to transfer the pattern of the transfer layer formed on the film onto the substrate. 
     
     
       7. The method of  claim 1 , further comprising subjecting the film to a pre-treatment process in an air or inert atmosphere in a washing chamber positioned at a front of the plurality of chambers. 
     
     
       8. The method of  claim 1 , wherein transferring the substrate into the chamber comprises mounting the substrate on a tray. 
     
     
       9. The method of  claim 1 , wherein the film is supplied in a horizontal direction, and the laser thermal transfer device is positioned above the tilm and irradiates laser beams from above the film toward a lower portion of the film to transfer the pattern of the transfer layer formed on the film onto the substrate. 
     
     
       10. The method of  claim 1 , wherein the film is supplied in a vertical direction, and the laser thermal transfer device is arranged parallel to the film, and irradiates laser beams in a horizontal direction to transfer the pattern of the transfer layer formed on the film onto the substrate. 
     
     
       11. The method of  claim 1 , further comprising attaching the film on which the transfer layer is formed to the substrate using lamination rolls positioned between the deposition unit and the laser thermal transfer device. 
     
     
       12. The method of  claim 1 , further comprising peeling the transferred film from the substrate using peeling rolls positioned next to the laser thermal transfer device.

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