Electron excited x-ray fluorescence device

Abstract

A device for providing for electron excited x-ray fluorescence may include means for driving two contacting surfaces against each other in a low fluid pressure environment, such that high energy electrons strike a sample under test and provide for x-ray fluorescence of the sample. The sample under test may be in or on a sample holder, whose position with respect to the contacting surfaces is adjustable. For example, the sample holder may be positionable to be a different distances from the contacting surfaces.

What is claimed is: 
     
       1. An electron excitation x-ray fluorescence (EXRF) device, comprising:
 a chamber; 
 a vacuum pump coupled to the chamber to maintain the chamber at a desired fluid pressure; 
 a first surface and a second surface in at least partial contact with one another within the chamber, at least one of the first surface and the second surface being drivable so as to vary portions of area of at least one of the first surface or the second surface in contact with the other of the first surface or the second surface, thereby creating a negative charge; 
 a sample holder within the chamber, the sample holder positioned in the chamber so as to have an at least partially clear line of sight to an area of the first surface as areas of the first surface exit contact with the second surface; 
 an electron source in the volume between the first surface and the sample holder; and 
 an x-ray detector positioned so as to have an at least partially clear line of sight to x-rays coming from the sample holder region. 
 
     
     
       2. The device of  claim 1 , wherein the electron source is a filament. 
     
     
       3. The device of  claim 2 , further comprising a current source coupled to the filament. 
     
     
       4. The device of  claim 3 , wherein the filament includes tungsten. 
     
     
       5. The device of  claim 1 , further comprising means for holding the sample holder at different distances to the first surface. 
     
     
       6. The device of  claim 1 , wherein the sample holder includes predetermined elements for use in calibrating the x-ray detector. 
     
     
       7. The device of  claim 1 , further comprising a second x-ray detector positioned so as to be able to receive x-rays emitted from a sample in the sample holder. 
     
     
       8. The device of  claim 1 , further comprising a material over at least part of the sample holder. 
     
     
       9. The device of  claim 8 , wherein the material is at a desired potential.