Method for preparing polycrystalline metal oxide pattern

Abstract

Disclosed is a method for preparing a polycrystalline metal oxide pattern, characterized by comprising: annealing a predetermined region of an amorphous metal oxide film by laser, so as to convert the amorphous metal oxide in the predetermined region into a polycrystalline metal oxide; and etching the amorphous metal oxide outside of the predetermined region so as to remove it. By the method according to the present invention, firstly, the predetermined region of an amorphous metal oxide film is annealed by laser so as to convert the amorphous metal oxide into a polycrystalline metal oxide, and then, the amorphous metal oxide outside of the predetermined region is etched away, thereby a polycrystalline metal oxide pattern is formed. The method for preparing a polycrystalline metal oxide pattern according to the present invention is simple, and can effectively shorten the production period and save production costs.

The invention claimed is: 
     
       1. A method for preparing a polycrystalline metal oxide pattern, characterized by comprising:
 annealing a predetermined region of an amorphous metal oxide film by irradiating it with laser light, so as to convert the amorphous metal oxide in the predetermined region into a polycrystalline metal oxide; and 
 etching the amorphous metal oxide outside of the predetermined region so as to remove it, 
 wherein the annealing step comprises: 
 using a plurality of point light sources of laser as a laser light source, and the laser generated from each of the plurality of point light sources are processed by an optical system so as to form projections of each of the plurality of laser point light sources on the amorphous metal oxide film, wherein the shape constituted by the projections of all the plurality of laser point light sources is the same as that of the predetermined region, 
 wherein the predetermined region represents as a part of the amorphous metal oxide film, not the whole area of the amorphous metal oxide film. 
 
     
     
       2. The method for preparing a polycrystalline metal oxide pattern according to  claim 1 , characterized in that the laser source is an ultraviolet excimer laser source. 
     
     
       3. The method for preparing a polycrystalline metal oxide pattern according to  claim 1 , characterized in that the etching process is a wet etching. 
     
     
       4. The method for preparing a polycrystalline metal oxide pattern according to  claim 1 , characterized by further comprising: forming an amorphous metal oxide film on a base substrate before the step of annealing the predetermined region of the amorphous metal oxide film by laser. 
     
     
       5. The method for preparing a polycrystalline metal oxide pattern according to  claim 1 , characterized in that the metal oxide is any one of tin oxide, indium tin oxide, indium tin zinc oxide, and indium gallium zinc oxide.