Particle and method for manufacturing same

Abstract

Manufacturing a particle may include inserting a supporting body into a receiving groove on a first substrate to accommodate a first surface of the supporting body into the receiving groove and to expose a second surface of the supporting body to outside; forming a first coating layer on the second surface; attaching a second substrate to the supporting body on which the first coating layer is formed; exposing the first surface of the supporting body on which the first coating layer is formed to outside, by separating the supporting body on which the first coating layer is formed and which is attached to the second substrate from the first substrate; forming a second coating layer on the first surface of the supporting body; and separating the supporting body, on which the first coating layer and the second coating layer are formed, from the second substrate.

What is claimed is: 
     
       1. A method for manufacturing particles, comprising:
 inserting supporting bodies into receiving grooves on a first substrate to accommodate a first surface of each of the supporting bodies into each of the receiving grooves and to expose a second surface of each of the supporting bodies to outside; 
 forming a first coating layer on the second surface; 
 attaching a second substrate to the supporting bodies on which the first coating layer is formed; 
 exposing the first surface of each of the supporting bodies on which the first coating layer is formed by separating the supporting bodies on which the first coating layer is formed and which is attached to the second substrate from the first substrate; 
 forming a second coating layer on the first surface of each of the supporting bodies; 
 separating the supporting bodies, on which the first coating layer and the second coating layer are formed, from the second substrate, wherein the combination of the first coating layer and the second coating layer is coated on the whole surface of each of the supporting bodies; and 
 removing a projecting coating layer that connects the supporting bodies, the projecting coating layer comprising the first coating layer and the second coating layer which have been formed directly onto the first substrate and the second substrate; and 
 making the first coating layer and the second coating layer uniform,
 wherein the inserting the supporting bodies into the receiving grooves includes dispersing the supporting bodies on the first substrate and applying physical pressure thereon by rubbing or pressing against the first substrate. 
 
 
     
     
       2. The method for manufacturing particles of  claim 1 , wherein the forming of the first coating layer and the forming of the second coating layer independently include vacuum evaporation, sputtering, or spin coating. 
     
     
       3. The method for manufacturing particles of  claim 2 , wherein the vacuum evaporation is performed at a temperature from about 10° C. to about 300° C. 
     
     
       4. The method for manufacturing particles of  claim 1 , wherein the second substrate further includes a polymer layer. 
     
     
       5. The method for manufacturing particles of  claim 4 , wherein the separating of the supporting bodies, on which the first coating layer and the second coating layer are formed, from the second substrate includes heating and removing the polymer layer. 
     
     
       6. The method for manufacturing particles of  claim 1 , wherein the making the first coating layer and the second coating layer uniform includes placing the supporting bodies on which the first coating layer and the second coating layer are formed between a nanostage and a plate, and moving the nanostage. 
     
     
       7. The method for manufacturing particles of  claim 6 , wherein the making the first coating layer and the second coating layer uniform further includes oxidizing the first coating layer and the second coating layer at a temperature of from about 100° C. to about 500° C. 
     
     
       8. The method for manufacturing particles of  claim 6 , wherein the moving of the nanostage includes rotating the nanostage. 
     
     
       9. The method for manufacturing particles of  claim 6 , wherein the moving of the nanostage includes moving linearly the nanostage. 
     
     
       10. The method for manufacturing particles of  claim 6 , wherein the moving of the nanostage includes rotating and moving linearly the nanostage. 
     
     
       11. The method for manufacturing particles of  claim 1 , wherein a thickness of each of the first coating layer and the second coating layer is independently from about 1 nm to about 10,000 nm. 
     
     
       12. The method for manufacturing particles of  claim 1 , wherein a size of each of the supporting bodies is from about 1 nm to about 100,000 nm. 
     
     
       13. The method for manufacturing particles of  claim 1 , wherein each of the first coating layer and the second coating layer independently includes a material selected from the group consisting of a single element metal, an alloy, a single element nonmetal, a nonmetal mixture, a metal-nonmetal mixture, a chalcogenide of nonmetal mixture, a nitride, a phosphide, a halide, and their combinations. 
     
     
       14. The method for manufacturing particles of  claim 1 , wherein the removing a projecting coating layer is performed by etching the projecting coating layer.