Radiation imaging apparatus, method for manufacturing the same, and radiation inspection apparatus

Abstract

A radiation imaging apparatus, comprising a sensor panel on which a plurality of sensors are arrayed, a scintillator that is arranged over a base member and is made of an alkali halide, and a protective film configured to suppress deliquescence of the scintillator, wherein the protective film includes a first portion that covers a side face of the scintillator and an end of the scintillator on a side opposite to the base member, and a second portion that is smaller in a content of fluorine than the first portion and covers at least part of a surface of the first portion.

What is claimed is: 
     
       1. A radiation imaging apparatus comprising:
 a sensor panel on which a plurality of sensors are arrayed; 
 a scintillator that is arranged over a base member and is made of an alkali halide; and 
 a protective film configured to suppress deliquescence of the scintillator, 
 wherein the protective film includes 
 a first portion that covers a side face of the scintillator and an end of the scintillator on a side opposite to the base member, and 
 a second portion that is smaller in a content of fluorine than the first portion and covers at least part of a surface of the first portion. 
 
     
     
       2. The apparatus according to  claim 1 , wherein
 the scintillator is made of a plurality of columnar crystals, 
 the first portion covers a side face and tip of each columnar crystal of the scintillator, 
 the protective film is made of a first resin serving as a fluorine-based resin and a second resin not serving as a fluorine-based resin, and 
 a ratio of the first resin to the second resin at the second portion is smaller than a ratio of the first resin to the second resin at the first portion. 
 
     
     
       3. The apparatus according to  claim 2 , wherein a film made of the first resin is formed to cover the side face and tip of each columnar crystal of the scintillator, and a member containing at least the second resin is formed to cover the scintillator while filling gaps between the columnar crystals covered with the first resin. 
     
     
       4. The apparatus according to  claim 2 , wherein the first resin contains at least one material selected from the group consisting of polytetrafluoroethylene, polychlorotrifluoroethylene, a tetrafluoroethylene-hexafluoropropylene copolymer, polyvinylidene fluoride, a fluorinated methacrylic acid ester polymer, polyvinyl fluoride, an ethylene-tetrafluoroethylene copolymer, and an ethylene-chlorotrifluoroethylene copolymer. 
     
     
       5. The apparatus according to  claim 2 , wherein the second resin contains at least one material selected from the group consisting of polyvinylidene chloride, a vinylidene chloride-vinyl chloride copolymer, a vinylidene chloride-acrylonitrile copolymer, polyvinyl chloride, an epoxy-based resin, an acrylic-based resin, a silicone-based resin, a urethane-based resin, a polyimide-based resin, cellulose acetate, cellulose nitrate, polymethyl methacrylate, polyvinyl butyral, polycarbonate, polyethylene terephthalate, polyethylene, nylon, a polyamide-based resin, a polyester-based resin, a styrene-butadiene rubber-based resin, and polyparaxylylene. 
     
     
       6. The apparatus according to  claim 2 , wherein
 a contact angle of the first resin and a water drop is larger than 90°, and 
 a contact angle of the second resin and a water drop is not larger than 90°. 
 
     
     
       7. The apparatus according to  claim 1 , wherein the sensor panel and the protective film are fixed via a bonding member. 
     
     
       8. A radiation imaging apparatus comprising:
 a sensor panel on which a plurality of sensors are arrayed; 
 a scintillator that is arranged over the sensor panel and is made of an alkali halide; and 
 a protective film configured to suppress deliquescence of the scintillator, 
 wherein the protective film includes 
 a first portion that covers a side face of the scintillator and an end of the scintillator on a side opposite to the sensor panel, and 
 a second portion that is smaller in a content of fluorine than the first portion and covers at least part of a surface of the first portion. 
 
     
     
       9. The apparatus according to  claim 8 , further comprising a base member arranged over the scintillator,
 wherein the scintillator is made of a plurality of columnar crystals, 
 the first portion covers a side face and tip of each columnar crystal of the scintillator, and 
 the base member is made of a material with light reflectivity. 
 
     
     
       10. The apparatus according to  claim 8 , wherein the base member and the protective film are fixed via a bonding member. 
     
     
       11. A radiation inspection apparatus comprising:
 a radiation imaging apparatus; and 
 a processor configured to process a signal from the radiation imaging apparatus, 
 the radiation imaging apparatus including: 
 a sensor panel on which a plurality of sensors are arrayed; 
 a scintillator that is arranged over a base member and is made of an alkali halide; and 
 a protective film configured to suppress deliquescence of the scintillator, 
 wherein the protective film includes 
 a first portion that covers a side face of the scintillator and an end of the scintillator on a side opposite to the base member, and 
 a second portion that is smaller in a content of fluorine than the first portion and covers at least part of a surface of the first portion. 
 
     
     
       12. A radiation inspection apparatus comprising:
 a radiation imaging apparatus; and 
 a processor configured to process a signal from the radiation imaging apparatus, 
 the radiation imaging apparatus including: 
 a sensor panel on which a plurality of sensors are arrayed; 
 a scintillator that is arranged over the sensor panel and is made of an alkali halide; and 
 a protective film configured to suppress deliquescence of the scintillator, 
 wherein the protective film includes 
 a first portion that covers a side face of the scintillator and an end of the scintillator on a side opposite to the sensor panel, and 
 a second portion that is smaller in a content of fluorine than the first portion and covers at least part of a surface of the first portion. 
 
     
     
       13. A method for manufacturing a radiation imaging apparatus, comprising:
 preparing a sensor panel on which a plurality of sensors are arrayed; 
 preparing a base member and forming, over the base member, a scintillator made of an alkali halide; 
 forming, over the scintillator, a protective film configured to suppress deliquescence of the scintillator; and 
 fixing, to the sensor panel, the base member on which the scintillator is formed, so as to bring the scintillator close to the plurality of sensors of the sensor panel, 
 wherein the forming the protective film includes 
 forming a first portion that covers a side face of the scintillator and an end of the scintillator on a side opposite to the base member, the first portion being part of the protective film, and 
 forming a second portion that is smaller in a content of fluorine than the first portion and covers at least part of a surface of the first portion, the second portion being part of the protective film. 
 
     
     
       14. A method for manufacturing a radiation imaging apparatus, comprising:
 preparing a sensor panel on which a plurality of sensors are arrayed; 
 forming, over the sensor panel, a scintillator made of an alkali halide; 
 forming, over the scintillator, a protective film configured to suppress deliquescence of the scintillator; and 
 preparing a base member and fixing the base member to the sensor panel on which the scintillator is formed, so as to bring the base member close to the scintillator, 
 wherein the forming the protective film includes 
 forming a first portion that covers a side face of the scintillator and an end of the scintillator on a side opposite to the sensor panel, the first portion being part of the protective film, and 
 forming a second portion that is smaller in a content of fluorine than the first portion and covers at least part of a surface of the first portion, the second portion being part of the protective film.