CMP brush packaging

Abstract

A method of packaging a CMP brush having a cylindrical brush portion and a pair of end connection portions. The method includes saturating the brush with a liquid; covering the cylindrical brush portion with a flexible sheet that extends around and engages the surface of the cylindrical portion; engaging each of the end connection portions with a respective end support; inserting the dampened brush into a rigid polymer tubular shipping container and supporting the end connection portions within the polymer tube; and providing an additional exterior self-supporting packaging.

What is claimed is: 
     
       1. A packaged chemical mechanical planarization (CMP) brush comprising:
 a wrapped dampened CMP brush comprising: 
 a cylindrical brush portion with a cylindrical surface and a pair of end connection portions, 
 a flexible polymer sheet material extending around the cylindrical brush portion and circumferentially engaging and covering the cylindrical brush portion, said flexible polymer sheet material including a perforation configured to remove the flexible polymer sheet material from the cylindrical brush portion, 
 and said flexible polymer sheet material extending around the cylindrical brush portion such that the wrapped dampened CMP brush is mountable on a CMP tool; 
 a pair of end support portions supportingly engaging each of the end connection portions, each end support portion having a central engagement feature in engagement with the end connection portion and a flange portion extending radially beyond the radial extent of the cylindrical surface; 
 an outer wrap that encloses said pair of end support portions and hermetically seals the wrapped dampened CMP brush, the end support portions configured to engage the ends of a rigid polymer shipping container whereby the brush is suspended therein with the cylindrical surface spaced from the rigid polymer shipping container; and 
 one or more end caps that enclose the rigid polymer shipping container. 
 
     
     
       2. The packaged CMP brush of  claim 1 , wherein the perforation of the flexible polymer sheet material is a spiral perforation. 
     
     
       3. The packaged CMP brush of  claim 1 , wherein the flexible polymer sheet material is configured to loosely wrap around the cylindrical brush portion and the perforation is a continuous slit. 
     
     
       4. The packaged CMP brush of  claim 1 , wherein the rigid polymer shipping container is configured as a rigid tube and wherein the end support portions are engaged with ends of the tube. 
     
     
       5. The packaged CMP brush of  claim 1 , further comprising a cardboard box with a square end shape, the CMP brush enclosed therein. 
     
     
       6. The packaged CMP brush of  claim 1 , wherein the flexible polymer sheet material extending around the cylindrical brush portion is a rectangular sheet rolled up on the cylindrical brush portion.