Arc lamp and substrate heating apparatus having the arc lamp

Abstract

An arc lamp includes an arc tube configured to receive a reaction gas therein, and an anode and a cathode disposed opposite one another within the arc tube and configured to generate an electrical arc. The anode includes an anode head portion extending inwardly from an end portion of the arc tube, and an anode tip portion bonded to the anode head portion and comprising a trench extending in a top surface along a peripheral region of the anode tip portion.

What is claimed is: 
     
       1. An arc lamp, comprising:
 an arc tube configured to receive a reaction gas therein; and 
 an anode and a cathode disposed opposite one another within the arc tube and configured to generate an electric arc, 
 the anode comprising:
 an anode head portion extending inwardly from an end portion of the arc tube; and 
 an anode tip portion bonded to the anode head portion, wherein the anode tip portion comprises a top surface, and wherein a trench is formed in the top surface and extends along a peripheral region of the top surface. 
 
 
     
     
       2. The arc lamp of  claim 1 , wherein the anode head portion comprises a first metal and the anode tip portion comprises a second metal having a melting point greater than a melting point of the first metal. 
     
     
       3. The arc lamp of  claim 2 , wherein the anode head portion has heat conductivity greater than heat conductivity of the anode tip portion. 
     
     
       4. The arc lamp of  claim 2 , wherein the anode head portion comprises copper and the anode tip portion comprises tungsten. 
     
     
       5. The arc lamp of  claim 1 , wherein a middle portion in the top surface of the anode tip portion is surrounded by the trench and is configured to be in contact with the electric arc. 
     
     
       6. The arc lamp of  claim 5 , wherein the anode tip portion further comprises a protruding portion protruding upwardly from the middle portion. 
     
     
       7. The arc lamp of  claim 5 , wherein the anode tip portion further comprises a protruding portion protruding upwardly from the middle portion and having a stepwise shape. 
     
     
       8. An arc lamp, comprising:
 an arc tube configured to receive a reaction gas therein; and 
 an anode and a cathode disposed opposite one another within the arc tube and configured to generate an electric arc, 
 the anode comprising:
 an anode head portion extending inwardly from an end portion of the arc tube; 
 an anode tip portion bonded to the anode head portion, wherein the anode tip portion comprises a top surface, and wherein a trench extends around the top surface in a peripheral region of the anode tip portion; and 
 a coolant channel for receiving a flow of a coolant liquid therethrough. 
 
 
     
     
       9. The arc lamp of  claim 8 , wherein the anode comprises an anode body installed in the end portion of the arc tube and providing a space therein for forming a portion of the coolant channel, the anode head portion being connected to the anode body. 
     
     
       10. The arc lamp of  claim 1 , wherein the arc tube comprises a cylindrical tube.