Method for producing a solid actuator

Abstract

A solid actuator has an actuator structural unit, a top plate and a base plate. A hollow cylinder part made of maraging steel is heated to a predetermined first temperature at which the maraging steel is in an austenitic state. A corrugated tube is shaped from the hollow cylinder part by a shaping process, while the maraging steel is still in an austenitic state. The corrugated tube is cooled such that the maraging steel is in a martensitic state. The actuator structural unit is inserted into the corrugated tube. The top plate and the base plate are fixed to the corrugated tube such that the actuator structural unit is clamped between the top plate and the base plate at a predetermined pre-tension.

What is claimed is: 
     
       1. A method for producing a solid-state actuator having an actuator structural unit, a top plate and a base plate, the method comprising:
 providing a hollow cylindrical part formed from maraging steel, 
 heating the hollow cylindrical part to a predefined first temperature at which the maraging steel is in an austenitic state, 
 shaping a corrugated tube out of the hollow cylindrical part using a deformation process while the maraging steel is in an austenitic state, 
 cooling the corrugated tube such that the maraging steel is in a martensitic state, 
 inserting the actuator structural unit into the corrugated tube, and 
 fixing the top plate and the base plate to the corrugated tube such that the actuator structural unit is braced between the top plate and the base plate with a predefined preload. 
 
     
     
       2. The method of  claim 1 , wherein the first temperature lies in a range between 700 and 950° C. 
     
     
       3. The method of  claim 1 , comprising, after the deformation process, cooling the corrugated tube until a predefined condition is met, and subsequently heating and age-hardening the corrugated tube in a predefined temperature range for a predefined time duration. 
     
     
       4. The method of  claim 3 , wherein the predefined temperature range for the age-hardening is between 400° C. and 500° C. 
     
     
       5. The method of  claim 1 , wherein the deformation process includes inserting the hollow cylindrical part into a mold part and charging a free interior space of the hollow cylindrical part with a predefined gas pressure.