US9947862B2ActiveUtilityPatentIndex 92
Magnetoresistive memory device
Est. expiryMar 14, 2036(~9.7 yrs left)· nominal 20-yr term from priority
Inventors:WATANABE DAISUKENAGASE TOSHIHIKOEEH YOUNGMINSAWADA KAZUYANAGAMINE MAKOTOOIKAWA TADAAKIYOSHINO KENICHIOHTORI HIROYUKI
G11C 11/161H01L 43/10H01L 43/08H01L 43/02H01L 27/222H10N 50/85H10B 61/00H10N 50/80H10N 50/10H10B 61/22
92
PatentIndex Score
16
Cited by
16
References
21
Claims
Abstract
According to one embodiment, a magnetoresistive memory device includes a first magnetic layer in which a magnetization direction is variable, a first nonmagnetic layer provided on the first magnetic layer, a second magnetic layer provided on the first nonmagnetic layer, a magnetization direction of the second magnetic layer being invariable, and a second nonmagnetic layer provided on the first magnetic layer, which is opposite the first nonmagnetic layer. The first magnetic layer includes Mo.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1. A magnetoresistive memory device comprising:
a first magnetic layer having a variable magnetization direction, the first magnetic layer including Mo;
a first nonmagnetic layer provided on the first magnetic layer;
a second magnetic layer provided on the first nonmagnetic layer, a magnetization direction of the second magnetic layer being invariable; and
a second nonmagnetic layer provided on the first magnetic layer, which is opposite the first nonmagnetic layer.
2. The device of claim 1 , wherein:
the first magnetic layer is a storage layer having magnetic anisotropy perpendicular to a film surface;
the second magnetic layer is a reference layer having magnetic anisotropy perpendicular to a film surface; and
the first nonmagnetic layer is a tunnel barrier layer through which a tunneling current flows.
3. The device of claim 1 , wherein the first nonmagnetic layer comprises MgO.
4. The device of claim 1 , wherein the first and the second nonmagnetic layers are different materials.
5. The device of claim 1 , wherein the first magnetic layer includes Fe or Co.
6. The device of claim 1 , wherein the first magnetic layer has a stacked layer structure in which a middle layer including Mo is provided between magnetic material layers.
7. The device of claim 1 , wherein the second nonmagnetic layer is an oxide.
8. The device of claim 6 , wherein the first magnetic layer comprises a plurality of the middle layers.
9. The device of claim 1 , further comprising a first layer on the second nonmagnetic layer, which is opposite the first magnetic layer.
10. The device of claim 9 , further comprising a first electrode, and a second electrode provided on the second magnetic layer, wherein
the first layer is provided on the first electrode.
11. The device of claim 9 , wherein the first layer includes at least one element selected from the group consisting of Al, Be, Mg, Ca, Sr, Ba, Sc, Y, La, Si, Zr, Hf, W, Cr, Mo, Nb, Ti, Ta, and V, or a boride of these elements.
12. A magnetoresistive memory device comprising:
a first magnetic layer having a variable magnetization direction, the first magnetic layer including Mo or W;
a first nonmagnetic layer provided on the first magnetic layer;
a second magnetic layer provided on the first nonmagnetic layer, a magnetization direction of the second magnetic layer being invariable; and
a second nonmagnetic layer of a nitrogen compound provided on the first magnetic layer, which is opposite the first nonmagnetic layer.
13. The device of claim 12 , wherein:
the first magnetic layer is a storage layer having magnetic anisotropy perpendicular to a film surface;
the second magnetic layer is a reference layer having magnetic anisotropy perpendicular to a film surface; and
the first nonmagnetic layer is a tunnel barrier layer through which a tunneling current flows.
14. The device of claim 12 , wherein the first magnetic layer includes Fe or Co.
15. The device of claim 12 , wherein the first magnetic layer has a stacked layer structure in which a middle layer including Mo or W is provided between magnetic material layers.
16. A magnetoresistive memory device comprising:
a first magnetic layer having a variable magnetization direction;
a first nonmagnetic layer provided on the first magnetic layer;
a second magnetic layer provided on the first nonmagnetic layer, a magnetization direction of the second magnetic layer being invariable;
a second nonmagnetic layer provided on the first magnetic layer, which is opposite the first nonmagnetic layer; and
a first layer comprising a magnetic material and a nonmagnetic material, the first layer provided on the second nonmagnetic layer, which is opposite the first magnetic layer.
17. The device of claim 16 , wherein the first nonmagnetic layer comprises MgO, and the second nonmagnetic layer comprises MgO.
18. The device of claim 16 , wherein the first magnetic layer has a stacked layer structure in which a middle layer including Mo or W is provided between magnetic material layers.
19. The device of claim 16 , wherein the first layer includes Co or Fe as the magnetic material and W or Mo as the nonmagnetic material, and the first layer is amorphous.
20. The device of claim 16 , further comprising a second layer on the first layer, which is opposite the second nonmagnetic layer, wherein
the second layer includes at least one element selected from the group consisting of Al, Be, Mg, Ca, Sr, Ba, Sc, Y, La, Si, Zr, Hf, W, Cr, Mo, Nb, Ti, Ta, and V, or a boride of these elements.
21. The device of claim 16 , wherein:
the first magnetic layer is a storage layer having magnetic anisotropy perpendicular to a film surface;
the second magnetic layer is a reference layer having magnetic anisotropy perpendicular to a film surface; and
the first nonmagnetic layer is a tunnel barrier layer through which a tunneling current flows.Cited by (0)
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