USD1023959SActiveUtility

Electrode for substrate processing apparatus

57
Assignee: ASM IP HOLDING BVPriority: May 11, 2021Filed: May 11, 2021Granted: Apr 23, 2024
Est. expiryMay 11, 2041(~14.8 yrs left)· nominal 20-yr term from priority
Inventors:Jeongho LeeJaehyun KimJinho ShinHyunsoo Jang
57
PatentIndex Score
2
Cited by
5,449
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for an electrode for substrate processing apparatus, as shown and described.

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