USD1032386SActiveUtility

MEMS mass flow controller

62
Assignee: HUANG LIJIPriority: Aug 17, 2022Filed: Aug 17, 2022Granted: Jun 25, 2024
Est. expiryAug 17, 2042(~16.1 yrs left)· nominal 20-yr term from priority
Inventors:Liji Huang
62
PatentIndex Score
2
Cited by
10
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       I claim the ornamental design for a MEMS mass flow controller, substantially as shown and described.

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