USD1055006SActiveUtility

Support ring for an interlocking process kit for a substrate processing chamber

Assignee: APPLIED MATERIALS INCPriority: Mar 18, 2022Filed: Mar 18, 2022Granted: Dec 24, 2024

Est. expiryMar 18, 2042(~15.7 yrs left)· nominal 20-yr term from priority

Inventors:Sahiti Nallagonda Jonathan Simmons Xinwei Huang Peter Muraoka Andreas Schmid

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Claims

exact text as granted — not AI-modified

CLAIM 
     
       The ornamental design for a support ring for an interlocking process kit for a substrate processing chamber, as shown and described.

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