USD1057675SActiveUtility

Pedestal for a substrate processing system

59
Assignee: LAM RES CORPPriority: Apr 12, 2021Filed: Apr 12, 2021Granted: Jan 14, 2025
Est. expiryApr 12, 2041(~14.7 yrs left)· nominal 20-yr term from priority
Inventors:Gary LindAndrew Paul Eib
59
PatentIndex Score
3
Cited by
30
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a pedestal for a substrate processing system as shown and described.

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