USD1069863SActiveUtility
Deposition ring of a process kit for semiconductor substrate processing
Est. expiryAug 4, 2042(~16.1 yrs left)· nominal 20-yr term from priority
67
PatentIndex Score
4
Cited by
57
References
1
Claims
Claims
exact text as granted — not AI-modifiedCLAIM
The ornamental design for a deposition ring of a process kit for semiconductor substrate processing, as shown and described.Cited by (0)
No later patents cite this yet.
References (0)
No backward citations on record.