USD1098056SActiveUtility

Substrate processing apparatus

11
Assignee: DAIKIN FINETECH LTDPriority: Mar 30, 2022Filed: Sep 12, 2022Granted: Oct 14, 2025
Est. expiryMar 30, 2042(~15.7 yrs left)· nominal 20-yr term from priority
Inventors:Yasunori Deguchi
11
PatentIndex Score
0
Cited by
17
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a substrate processing apparatus, as shown and described.

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