USD1110975SActiveUtility

Collimator for a physical vapor deposition (PVD) chamber

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Assignee: APPLIED MATERIALS INCPriority: Jan 12, 2022Filed: Jul 8, 2024Granted: Feb 3, 2026
Est. expiryJan 12, 2042(~15.5 yrs left)· nominal 20-yr term from priority
Inventors:ZHANG FUHONGRIKER MARTIN LEEBANGALORE UMESH SUHASSHIMOGA MYLARAPPA MADAN KUMAR
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PatentIndex Score
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Cited by
221
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a collimator for a physical vapor deposition (PVD) chamber, as shown and described.

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