USD1115719SActiveUtility
Lower edge ring of a process kit for semiconductor substrate processing
Est. expiryJan 19, 2038(~11.5 yrs left)· nominal 20-yr term from priority
Inventors:MUSTAFA MUHANNADRASHEED MUHAMMAD MLEI YUGELATOS AVGERINOS VBANTHIA VIKASHCALDERON VICTOR HTOH SHI WEILEE YUNG-HSINSEN ANINDITA
H10P 72/7616H10P 72/72H01J 37/32715H01J 2237/3344H10P 72/7624H10P 72/70H10P 72/7611H10P 72/7606
74
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Claims
exact text as granted — not AI-modifiedCLAIM
The ornamental design for a lower edge ring of a process kit for semiconductor substrate processing, as shown and described.Join the waitlist — get patent alerts
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