USD1117121SActiveUtility

Pedestal for a substrate processing system

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Assignee: LAM RES CORPPriority: Jul 7, 2023Filed: Jul 7, 2023Granted: Mar 10, 2026
Est. expiryJul 7, 2043(~17 yrs left)· nominal 20-yr term from priority
Inventors:RAO SHREESHA YOGISHBIRRU KRISHNAKOTHAPALLI VIJAYCHEN XITONGKHO LEONARD
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PatentIndex Score
0
Cited by
35
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a pedestal for a substrate processing system as shown and described.

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